Ice lithography for 3D nanofabrication

Zhao, Ding; Han, Anpan; Qiu, Min

doi:10.1016/j.scib.2019.06.001

Cited by 43 publications

(28 citation statements)

References 36 publications

(38 reference statements)

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“…Recent advances in nanofabrication methods include 3D nanofabrication technology, where the objects are built additively by using cross-sectional layer methods. Besides, updated microfluidic systems such as flash nanoprecipitation (FNP) offer precise control at the nanoscale with multiple applications in the development of PN-based therapeutic systems [ 52 , 107 , 108 , 109 ]. Microfluidics require only very small volumes of nanoparticle precursors and provides precise control of phases mixing to produce reproducible PNs with different physicochemical properties [ 62 ].…”

Section: Polymeric Nanocarriers Against Intracellular Infections: mentioning

confidence: 99%

Recent Advances in Polymeric Nanoparticle-Encapsulated Drugs against Intracellular Infections

2020

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Polymeric nanocarriers (PNs) have demonstrated to be a promising alternative to treat intracellular infections. They have outstanding performance in delivering antimicrobials intracellularly to reach an adequate dose level and improve their therapeutic efficacy. PNs offer opportunities for preventing unwanted drug interactions and degradation before reaching the target cell of tissue and thus decreasing the development of resistance in microorganisms. The use of PNs has the potential to reduce the dose and adverse side effects, providing better efficiency and effectiveness of therapeutic regimens, especially in drugs having high toxicity, low solubility in the physiological environment and low bioavailability. This review provides an overview of nanoparticles made of different polymeric precursors and the main methodologies to nanofabricate platforms of tuned physicochemical and morphological properties and surface chemistry for controlled release of antimicrobials in the target. It highlights the versatility of these nanosystems and their challenges and opportunities to deliver antimicrobial drugs to treat intracellular infections and mentions nanotoxicology aspects and future outlooks.

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Section: Polymeric Nanocarriers Against Intracellular Infections: mentioning

confidence: 99%

Recent Advances in Polymeric Nanoparticle-Encapsulated Drugs against Intracellular Infections

2020

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“…Ice-assisted EBL (iEBL), also known as ice lithography, , utilizing water ice as an electron resist, has exhibited great advantages in 3D nanofabrication. − On the basis of this technique, we propose here a streamlined, ecofriendly, and utterly solvent-free nanofabrication procedure. It starts with vapor-depositing ice on samples and ends in the sublimation of the ice followed by a “blow-off” process.…”

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confidence: 99%

Solvent-Free Nanofabrication Based on Ice-Assisted Electron-Beam Lithography

et al. 2020

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Advances in electron-beam lithography (EBL) have fostered the prominent development of functional micro/nanodevices. Nonetheless, traditional EBL is predominantly applicable to large-area planar substrates and often suffers from chemical contamination and complex processes for handling resists. This paper reports a streamlined and ecofriendly approach to implement e-beam patterning on arbitrary shaped substrates, exemplified by solventfree nanofabrication on optical fibers. The procedure starts with the vapor deposition of water ice as an electron resist and ends in the sublimation of the ice followed by a "blow-off" process. Without damage and contamination from chemical solvents, delicate nanostructures and quasi-3D structures are easily created. A refractive index sensor is further demonstrated by decorating plasmonic nanodisk arrays on the end face of a single-mode fiber. Our study provides a fresh perspective in EBL-based processing, and more exciting research exceeding the limits of traditional approaches is expected.

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“…However, these structures are limited to thin film structures, not 3‐D nanostructures. Few nanofabrication technologies capable of producing 3‐D nanostructures, such as two‐photon laser printing, [ 1 ] stereolithography, [ 2 ] and interference lithography, exist, but they are limited to photosensitive materials and cannot produce 3‐D single crystal nanostructures directly. [ 3 ] Other techniques, such as template‐guided 3‐D nanofabrication, are capable of producing 3‐D nanostructures consisting of heterogeneous materials, but it is difficult to achieve nanoscale spherical shapes.…”

Section: Introductionmentioning

confidence: 99%

3‐D Nanofabrication of Silicon and Nanostructure Fine‐Tuning via Helium Ion Implantation

Wen

Mao

2022

Adv Materials Inter

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Despite the continued scaling down of semiconductor manufacturing, traditional lithography‐based nanofabrication only produces thin film structures, not 3‐D shapes. 3‐D nanofabrication remains a major challenge, especially for semiconductor materials. Most 3‐D nanofabrication techniques, such as two‐photon printing and stereolithography, mostly work for polymer materials, not solid‐state semiconductor materials. Here, a method capable of fabricating sophisticated 3‐D nanostructures of silicon based on the subsurface swelling phenomenon using focused helium ion swelling is reported. Silicon nanosphere arrays, hierarchical nanospheres mimicking compound lenses, nano‐Taichi symbols, three‐layer nanotowers, and nanopumpkins have been demonstrated, which are challenging for existing nanofabrication technology. The produced silicon nanostructures exhibit super small surface roughness as small as 0.1 nm, two orders of magnitude better than existing 3‐D nanofabrication technologies normally above 10 nm. The super small surface roughness opens doors for many exciting applications in photonics, indicating small photon losses. Moreover, it is demonstrated ultraprecise fine‐tuning of critical dimensions of ready‐made nanostructures or nanodevices, such as tuning the tilting angle of the tip on the atomic force microscopy probe and reducing the nanogap between two metal electrodes from 200 to 4 nm, which is promising for improving nanodevice performances by tuning the critical dimensions to desired ranges.

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Ice lithography for 3D nanofabrication

Cited by 43 publications

References 36 publications

Recent Advances in Polymeric Nanoparticle-Encapsulated Drugs against Intracellular Infections

Recent Advances in Polymeric Nanoparticle-Encapsulated Drugs against Intracellular Infections

Solvent-Free Nanofabrication Based on Ice-Assisted Electron-Beam Lithography

3‐D Nanofabrication of Silicon and Nanostructure Fine‐Tuning via Helium Ion Implantation

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