p-type behavior in In–N codoped ZnO thin films

Abstract

p -type ZnO thin films have been realized by the In–N codoping method. Secondary ion mass spectroscopy revealed that the nitrogen incorporation was enhanced by the presence of indium in ZnO. The as-grown In–N codoped ZnO film shows acceptable p-type behavior at room temperature with high film quality. A conversion from p-type conduction to n type in a range of temperature was confirmed by Hall effect measurement. The lowest reliable room-temperature resistivity was found to be 3.12Ωcm with a carrier concentration of 2.04×1018cm−3 and a Hall mobility of 0.979cm2V−1S−1. The p-type behavior is stable.

B-N Codoped p Type ZnO Thin Films for Optoelectronic Applications

“…Codoping of ZnO with group III and group V elements can be utilized to improve the acceptor solubility and thereby making acceptor levels shallower 7 . A few reports are available in the literature studying the feasibility of Al-N codoping 8 , In-N codoping [9][10][11] , B-N codoping 12 , Ga-N codoping 13 , Ag-N codoping 14 , Sn-N codoping 15 etc. in order to improve the p type electrical performance of ZnO thin films.…”

Design of shallow acceptors in ZnO through early transition metals codoped with N acceptors

“…The traditional co-doping approach 9 by doping donor and acceptor simultaneously is another way to enhance the solubility of a dopant in ZnO. There have been several publications reporting on successful fabrication of codoped p-type ZnO 5, [10][11][12][13][14][15][16] , as well as failures [17][18][19] . However, the high ionization energy of acceptors, caused by the very low valence band maximum (VBM) of ZnO, is hard to overcome 20 .…”

ZnO Doping and Defect Engineering—A Review

“…In codoping with N was also found to dramatically enhance the N incorporation into ZnO [131,146,147]. The SIMS experiments were performed on a two-layer-structured film consisting of In-N-codoped ZnO and a N-doped ZnO on top.…”