2014
DOI: 10.1063/1.4902915
|View full text |Cite
|
Sign up to set email alerts
|

In situ Raman spectroscopy for growth monitoring of vertically aligned multiwall carbon nanotubes in plasma reactor

Abstract: Portable and highly sensitive Raman setup was associated with a plasma-enhanced chemical vapor deposition reactor enabling in situ growth monitoring of multi-wall carbon nanotubes despite the combination of huge working distance, high growth speed and process temperature and reactive plasma condition. Near Edge X-ray absorption fine structure spectroscopy was used for ex situ sample analysis as a complementary method to in situ Raman spectroscopy. The results confirmed the fact that the “alternating” method de… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
9
0

Year Published

2015
2015
2024
2024

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 18 publications
(9 citation statements)
references
References 30 publications
0
9
0
Order By: Relevance
“…The detailed description of the PECVD reactor and the growth of multi-wall CNTs (MWNTs) was reported in our previous studies [49,50]. In these experimental studies, the growth of MWNTs is achieved on a Si substrate using Ni nanocatalyst by PECVD in three steps.…”
Section: Methodsmentioning
confidence: 99%
“…The detailed description of the PECVD reactor and the growth of multi-wall CNTs (MWNTs) was reported in our previous studies [49,50]. In these experimental studies, the growth of MWNTs is achieved on a Si substrate using Ni nanocatalyst by PECVD in three steps.…”
Section: Methodsmentioning
confidence: 99%
“…Spectra were acquired at the C and O K-edges, in the total and partial energy electron yield (TEY and PEY) mode. The raw spectra were normalized to the incident photon flux and corrected for the beam line transmission by division through a spectrum which was obtained with a sputtered Au sample [26][27][28]. The monochromator energy scale was calibrated using the carbon K-edge π* transition of graphite, located at 285.4 eV.…”
Section: Nexafs Spectroscopymentioning
confidence: 99%
“…Since the beginning of the 2000s, long working distance systems based on high resolution commercial devices are coupled with other instruments. 9,10 Handheld instruments are also commonly used in geology 11 or astrobiology. 12,13…”
Section: Introductionmentioning
confidence: 99%
“…Since the beginning of the 2000s, long working distance systems based on high resolution commercial devices are coupled with other instruments. 9,10 Handheld instruments are also commonly used in geology 11 or astrobiology. 12,13 The coupling of particle irradiation with in situ Raman detection is particularly relevant for present and future missions to Mars dedicated to the search for traces of life and organic molecules.…”
Section: Introductionmentioning
confidence: 99%