2006
DOI: 10.1063/1.2357891
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In situ electric field simulation in metal/insulator/metal capacitors

Abstract: The authors report in this letter the effect of interface topography on metal/insulator/metal (MIM) capacitor electrical properties. This analysis was carried out by numerical simulations of the electric field established in a MIM structure with a 45nm thick Ta2O5 film. The metal/insulator interface profiles have been extracted from transmission electron microscopy micrographs of a fully integrated device. This in situ approach allows direct comparison between electrical properties and numerical simulations pe… Show more

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Cited by 63 publications
(50 citation statements)
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“…This is also true of other deposition techniques that produce very uniform, smooth lms, such as metal-organic chemical vapour deposition (MOCVD). We note, in support of this assertion, work by Gaillard et al, 18 demonstrating that, for MIM samples in which the lower TiN electrode is deposited by sputtering (and therefore consists of many grains and a rough top surface), if the oxide layer is deposited by MOCVD, the roughness of the top interface is much less than that of the bottom. The inference is that the deposition of a homogeneous oxide layer gradually reduces the roughness of the top interface to a value determined by the thickness of the oxide.…”
Section: 15supporting
confidence: 54%
“…This is also true of other deposition techniques that produce very uniform, smooth lms, such as metal-organic chemical vapour deposition (MOCVD). We note, in support of this assertion, work by Gaillard et al, 18 demonstrating that, for MIM samples in which the lower TiN electrode is deposited by sputtering (and therefore consists of many grains and a rough top surface), if the oxide layer is deposited by MOCVD, the roughness of the top interface is much less than that of the bottom. The inference is that the deposition of a homogeneous oxide layer gradually reduces the roughness of the top interface to a value determined by the thickness of the oxide.…”
Section: 15supporting
confidence: 54%
“…The carrier injection level was enhanced significantly by the introduction of Ag island film, accompanied by the obvious decrease of the threshold voltage. We attributed this increase in carrier injection to the surface roughening of Ag island film (49,50) and the enhanced local electromagnetic field surrounding Ag particles (51,52).…”
Section: Ecs Transactionsmentioning
confidence: 99%
“…The increase in carrier injection is attributed to the rough surface of the Ag layer containing Ag particles, which enhances the inhomogeneous local electric fields at the interface between the Ag layer and the silicon nitride matrix. [30][31][32] The enhanced inhomogeneous local electric fields can increase the tunneling probability of carriers into Si QDs through the silicon nitride. Therefore, an Ag layer is believed to greatly increase h inj in Si QD LEDs.…”
mentioning
confidence: 99%