<i>In</i> <i>situ</i> observation of the tip shape of Co–Ge liquid alloy ion sources in a high-voltage transmission electron microscope

Driesel, Wolfgang

doi:10.1116/1.589201

Cited by 18 publications

(1 citation statement)

References 7 publications

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“…Numerous experimental data [11][12][13][14] testify that an increase in external potential difference is accompanied not only by the appearance and increase of the emission current, but also by a decrease of the cone angle. The latter phenomenon can be interpreted as the system response aimed at the conservation of the pressure balance under the conditions of the screening effect of the space charge.…”

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Influence of the space charge on the configuration of conical spikes on a liquid-metal surface

Boltachev

Зубарев

2006

Europhys. Lett.

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The influence of the space charge of ions evaporated from the surface of a conical spike that develops on a liquid-metal anode on the spike shape has been studied theoretically. A possibility of the self-similar reduction of the equations that govern the space distributions of the electric field, ion velocity field, and space charge density to a system of ordinary differential equations has been revealed. Its solution, which is compatible with the balance condition for the capillary and electrostatic forces at a free liquid surface, has allowed us to obtain the current-voltage characteristic for a liquid-metal ion source and the current dependence of the cone angle. An increase in emission current leads to a monotonic decrease of the cone angle, which agrees with the available experimental data.

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confidence: 99%

Influence of the space charge on the configuration of conical spikes on a liquid-metal surface

Boltachev

Зубарев

2006

Europhys. Lett.

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Ion Beam Technology

Schmidt

Wetzig

2012

Ion Beams in Materials Processing and Analysis

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Nanostructures by Mass-Separated FIB

Bischoff

Böttger

Philipp

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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The introduction of mass-separated systems in the field of focused ion beams significantly increases the area of application in nanotechnology due to the availability of a broad spectrum of ions with the same advantages compared to classical Ga instruments. A short description of the configuration of a mass-separated FIB tool is given as well as the fundamentals of alloy liquid metal ion sources. Examples of application include patterned tailoring of functional surfaces and ioninduced phase transformation in thin layers, in particular the Si nanowire fabrication by FIB implantation and subsequent wet-chemical, anisotropic etching and the FIB lithography of thin ta-C films. Furthermore, the ion beam synthesis (IBS) of CoSi 2 nanostructures by Co-FIB writing and annealing, and the modification of surface morphology by various mono-and polyatomic projectiles in a broad energy and temperature range in different materials are described and discussed.

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In situ observation of the tip shape of Co–Ge liquid alloy ion sources in a high-voltage transmission electron microscope

Abstract: In situ and dynamic observation of NdFeCoB magnet by high voltage transmission electron microscope (abstract)

Cited by 18 publications

References 7 publications

Influence of the space charge on the configuration of conical spikes on a liquid-metal surface

Influence of the space charge on the configuration of conical spikes on a liquid-metal surface

Ion Beam Technology

Nanostructures by Mass-Separated FIB

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