1991
DOI: 10.1063/1.105672
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Insitu determination of free-carrier concentrations by reflectance difference spectroscopy

Abstract: We determine types and concentrations of free carriers in GaAs layers under organometallic chemical vapor deposition growth conditions from the linear electro-optic structure observed near 3 eV in reflectance-difference spectroscopy. The sensitivity is about 1017 cm−3 at 400 °C and 1018 cm−3 at 600 °C, sufficient to measure common doping levels at or near growth temperatures. We observed the transition between n- and p-type doping during atomic layer epitaxy of a carbon-doped p-type layer on an n-type substrat… Show more

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Cited by 88 publications
(54 citation statements)
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“…Our results are consistent with those reported in Ref. 12. Assuming that the LEO coefficient of the LT-GaAs is the same as normal GaAs, the effective surface electric field of the LT-GaAs samples, 2kV b , can then be obtained.…”
Section: ͑3͒supporting
confidence: 82%
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“…Our results are consistent with those reported in Ref. 12. Assuming that the LEO coefficient of the LT-GaAs is the same as normal GaAs, the effective surface electric field of the LT-GaAs samples, 2kV b , can then be obtained.…”
Section: ͑3͒supporting
confidence: 82%
“…Compared to that of the SI-GaAs substrate, the anisotropy spectra of the n-type GaAs shows an additional positive resonance near E 1 ϭ2.95 eV, and a negative resonance near E 1 ϩ⌬ 1 ϭ3.15 eV. This is typical of the n-type GaAs samples reported previously, 12 and is resulted from the LEO effect produced by the surface electric field. 10,11 The structures in the vicinity of E 1 and E 1 ϩ⌬ 1 for the as-grown LT-GaAs samples are similar to that of the n-type GaAs sample.…”
mentioning
confidence: 67%
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“…RAS has also been used to measure the SEF of GaAs via the so-called linear electro-optic effect (LEO). The LEO effect on the optical anisotropy of GaAs (001) surfaces was first observed by Acosta-Ortiz and Lastras-Martinez [14] and could be shown to depend linearly on the SEF [15][16][17]. While most investigations on the LEO effect focussed on the characterization of clean GaAs surfaces, Sobiesierski et al [18,19] investigated the LEO effect at Si d-doped GaAs (001) surfaces.…”
mentioning
confidence: 95%