2014
DOI: 10.1002/ppap.201300129
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c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films

Abstract: Highly fluorinated polymeric (CFX), fluorine containing diamond‐like carbon (F‐DLC) and, for comparison, diamond‐like carbon (DLC) films have been plasma deposited in a RF parallel plate reactor by using c‐C4F8 as fluorine precursor and different mixtures of argon, C2H2, and H2. Plasmas have been characterized by optical emission spectroscopy, mass spectrometry, and Langmuir probe measurements. Differences in the film composition and structure have been related with the type of species formed in the plasma and… Show more

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Cited by 10 publications
(8 citation statements)
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References 48 publications
(94 reference statements)
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“…The absorption band related to CC vibration can also be detected. Both the FT‐IR signals are typical polymeric features of CF‐film as reported by previous literature, indicating the successful preparation of the CF‐film. From the atomic force microscope (AFM) image (Figure b), the deposited CF‐film is smooth and compact with a low root‐mean‐square surface roughness of 1.4 nm as obtained by AFM measurements.…”
Section: Resultssupporting
confidence: 84%
See 1 more Smart Citation
“…The absorption band related to CC vibration can also be detected. Both the FT‐IR signals are typical polymeric features of CF‐film as reported by previous literature, indicating the successful preparation of the CF‐film. From the atomic force microscope (AFM) image (Figure b), the deposited CF‐film is smooth and compact with a low root‐mean‐square surface roughness of 1.4 nm as obtained by AFM measurements.…”
Section: Resultssupporting
confidence: 84%
“…Fourier transform infrared (FT‐IR) spectra of the as‐deposited CF‐film is shown in Figure a. The absorption band at 1200 cm −1 is characteristic absorption of the CF 2 groups . The absorption band related to CC vibration can also be detected.…”
Section: Resultsmentioning
confidence: 99%
“…When the energy of C + cations reaches 100 eV, incident ions are trapped in the subsurface layers as interstitials, thus favoring the increase of inner stress and the formation of metastable phases. 61 Taking higher energy into consideration, the relaxation of stress and structure results in the transformation of the partial sp 3 bonds into sp 2 bonds, which are called "thermal spikes".…”
Section: Deposition Mechanismmentioning
confidence: 99%
“…In addition, the structural arrangement with increase in V b (xed the partial pressure of CF 4 ¼ 67%) changes from a diamond-like to polymer-like structure. 61…”
Section: Deposition Mechanismmentioning
confidence: 99%
“…These results have been complemented with other by Scanning Electron Microscopy and Energy Dispersive X-ray Spectroscopy (SEM-EDX) that provide both laterally resolved chemical information and the capacity to investigate inner layers of the seed (i.e., embryo, radicle and perisperm). For this study we have used two types of air plasmas: an atmospheric pressure dielectric barrier discharge (DBD) plasma 28 and a low pressure radiofrequency 29 (RF) plasma. Although differing in treatment time, these two plasma treatments produced an improvement in the germination capacity of the Quinoa seeds and induced similar transformations of surface chemistry after plasma and then water vapor exposures.…”
Section: Introductionmentioning
confidence: 99%