2014
DOI: 10.4028/www.scientific.net/amm.643.60
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Hysteresis Compensation Control for a Current-Driven Reluctance Actuator Using the Adaptive MNN

Abstract: The next-generation semiconductor lithography equipment needs a suitable actuator to meet the requirement of high-speed, high-acceleration and high-precision. Reluctance actuator, which has a unique property of small volume, low current and can produce great force, is a very suitable choice. One of the major application challenges of reluctance actuator is the hysteresis of the force, which has a nonlinear relationship with respect to the current and is directly related to the final accuracy in the nanometer r… Show more

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Cited by 3 publications
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