Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography

Nakazato, Tomoharu; Furukawa, Yusuke; Tanaka, Momoko; Tatsumi, Tadashi; Nishikino, Masaharu; Yamatani, Hiroshi; Nagashima, Keisuke; Kimura, Toyoaki; Murakami, Hidetoshi; Saito, Shigeki; Shimizu, Toshihiko; Sarukura, Nobuhiko; Nishimura, Hiroaki; Mima, K.; Kagamitani, Yuji; Ehrentraut, Dirk; Fukuda, Tsuguo

doi:10.1016/j.jcrysgro.2008.09.106

Cited by 27 publications

(8 citation statements)

References 10 publications

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“…The hydrothermal method is a novel growth method suitable for growing various crystals, including oxides such as ZnO, and is capable of producing highcrystalline quality and large-sized homogeneous samples. The capability of a hydrothermal-method-grown ZnO crystal as a scintillator in the UV region has been demonstrated wherein the reported decay time was 1 ns with EUV excitation [8][9][10]. Subsequently, we have succeeded in improving the response time of the ZnO scintillator by modifying the approach in growing the crystal by the hydrothermal method in order to introduce fluorescence quenching channels.…”

Section: Introductionmentioning

confidence: 99%

Response-time-improved ZnO scintillator by impurity doping

Kano¹,

Wakamiya²,

Sakai

et al. 2011

Journal of Crystal Growth

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Section: Introductionmentioning

confidence: 99%

Response-time-improved ZnO scintillator by impurity doping

Kano¹,

Wakamiya²,

Sakai

et al. 2011

Journal of Crystal Growth

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“…The lifetimes do not differ with the microrod dimensions and even with the visible emission intensities. Compared with bulk and undoped ZnO crystals with 1 ns lifetimes [7,11,34], the ZnO microrods prepared by the ACG method exhibit faster picosecond UV emission lifetimes. Fast lifetimes can be largely attributed to the effective nonradiative recombination with the activation of nonradiative centers at room temperature [21,33,35].…”

Section: Resultsmentioning

confidence: 99%

Intense and fast UV emitting ZnO microrods fabricated by low temperature aqueous chemical growth method

Santos-Putungan

Empizo

Yamanoi

et al. 2016

Journal of Luminescence

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a b s t r a c tIntense and fast ultraviolet (UV) emitting zinc oxide (ZnO) microrods are successfully fabricated by low temperature aqueous chemical growth (ACG) method. Uniform and hexagonal microrods of varying dimensions are synthesized using different zinc acetate dihydrate (ZnAc) and hexamethelynetetramine (HMTA) molar concentration ratios. Although exhibiting broad orange emissions, the microrods have intense UV emissions with lifetimes as fast as 30-40 ps. Analyses show that there is no definite correlation between the microrod dimensions and the optical emissions. Nevertheless, with the ease on the microcrystal fabrication, these ZnO microrods with intense and fast UV emissions have potential use for future scintillator applications.

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“…Previously, we have evaluated the optical properties of ZnO as a fast scintillator in the soft X-ray region using a Ni-like Ag plasma soft X-ray laser at the Japan Atomic Energy Agency (JAEA) and SPring-8 Compact SASE (Self Amplification of Spontaneous Emission) Source (SCSS) test accelerator [15] at Spring-8, RIKEN. We were able to demonstrate that the 380-nm emission and 1-ns lifetime is independent of excitation wavelength, whether it was in the soft X-ray or UV region [8], [16], [17]. Furthermore, we have succeeded in shortening its emission lifetime to less than 100 ps and its rise time to 10 ps by intentional Fe ion-doping.…”

mentioning

confidence: 84%

Potential High-Spatial Resolution In-Situ Imaging of Soft X-Ray Laser Pulses With ZnO Crystal

Nakazato

Shimizu

Yamanoi

et al. 2012

IEEE Trans. Nucl. Sci.

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We show that a hydrothermal method-grown ZnO is a potential material of an imaging device for soft X-ray laser diagnostics. The beam profile of a soft X-ray laser was evaluated by characterizing the exciton emission patterns of ZnO. The single shot image of emission patterns is clear enough to monitor the evolution of the beam radius around the focal point. By plotting the emission pattern radii at each position, the beam profile of the Ni-like Ag ion plasma laser was estimated from the waist radii as 29 m and 21 m in the horizontal and vertical axis, respectively. The divergence angle was estimated to be around 7.2 mrad and 11 mrad in the horizontal and vertical axis, respectively. The beam quality evaluated from the factor was 47 along the horizontal axis and 50 along the vertical axis. Spatial resolution of the magnifier was estimated to be 6 m and is expected to improve by optimizing the optics of the magnifier and using a telescope. Our results would enhance the use of ZnO as a high-spatial resolution in-situ imaging device that would play a crucial role in the development and application of soft X-ray light sources.

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Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography

Cited by 27 publications

References 10 publications

Response-time-improved ZnO scintillator by impurity doping

Response-time-improved ZnO scintillator by impurity doping

Intense and fast UV emitting ZnO microrods fabricated by low temperature aqueous chemical growth method

Potential High-Spatial Resolution In-Situ Imaging of Soft X-Ray Laser Pulses With ZnO Crystal

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