Hydrothermal method grown large-sized zinc oxide single crystal as fast scintillator for future extreme ultraviolet lithography

Abstract

The scintillation properties of a hydrothermal method grown zinc oxide (ZnO) crystal are evaluated for extreme ultraviolet (EUV) laser excitation at 13.9nm wavelength. The exciton emission lifetime at around 380nm is determined to be 1.1ns, almost identical to ultraviolet laser excitation cases. This fast response time is sufficiently short for characterizing EUV lithography light sources having a few nanoseconds duration. The availability of large size ZnO crystal up to 3in. is quite attractive for future lithography and imaging applications.

Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography

“…Using a nickel-like silver laser, a response time of a few nanoseconds was demonstrated [3]. In this paper, we present results on the temperature dependence of the 380-nm emission of a ZnO crystal.…”

“…A more detailed description of the experimental setup as well as the scintillation properties of ZnO when excited by the 351 nm third harmonics of the 1053 nm chirped pumping source for the EUV laser can be found in Ref. [3]. In order to measure its scintillation properties at different temperatures, a temperature-controlled cryostat was added to the experimental setup in our previous report [3].…”

“…[3]. In order to measure its scintillation properties at different temperatures, a temperature-controlled cryostat was added to the experimental setup in our previous report [3]. The spectrum-resolved streak image of emission from ZnO excited by the EUV excitation source was measured for temperatures 298, 244, 192, 145, 105, and 25 K.…”

ZnO as Fast Scintillators Evaluated with Ni-like Ag Laser

“…9,10) Recently, the room temperature scintillation properties of ZnO in the EUV region using a nickel-like silver laser were demonstrated and a response time of a few nanoseconds was reported. 11) In this paper, we present results on the temperature dependence of the ultraviolet emission of a ZnO crystal at 3.2 eV photon energy.…”

Development of Driver Laser System for 0.1-Hz X-ray Laser

“…Now our interests are on application of the x-ray laser. Some kinds of application research, such as x-ray speckle measurement, 8) interaction with cluster, 9) and x-ray laser pump fluorescence, 10) have been already carried out.…”