N‐arylsulfonimides, a new class of non‐ionic photoacid generators (PAGs) able to release two equivalents of strong sulfonic acids per equivalent of PAG are employed in solid state polymerization within an epoxy based hybrid sol‐gel system. Thus, epoxy ring opening reactions were successfully induced by UV light exposure of sol‐gel films and the organic network progression was followed by infrared spectroscopy. Polymerization degrees reached with N‐arylsulfonimides were close to that obtained with a commercial PAG (4‐phenylthiophenyl)diphenylsulfonium triflate, DPST). Different micrometric patterns with satisfactory pattern definition were achieved by UV lithography of sol‐gel films containing a N‐arylsulfonimide. These new PAGs are therefore promising photoinitiators to be applied in photopolymerization processes and microelectronics.