Hydrogenated amorphous and nanocrystalline silicon solar cells deposited by HWCVD and RF-PECVD on plastic substrates at 150°C

Filonovich, Sergej; Alpuim, P.; Rebouta, L.; Bourée, Jean-Éric; Soro, Yrebegnan Moussa

doi:10.1016/j.jnoncrysol.2007.09.030

Cited by 28 publications

(12 citation statements)

References 5 publications

(5 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Although red phosphorus has a fairly high vapor pressure under vacuum [31], direct reactions between phosphorus vapor and H atoms in the gas phase must be minor. Finally, the highest PH 3 density observed in the present system, 1.3×10 13 cm -3 , is more than or comparable to those in many catalytic (hot-wire) [1][2][3][4][5][6][7][8][9] and plasma-enhanced [9][10][11][12][13][14][15][16][17][18][19] chemical vapor deposition processes. In other words, the amount of PH 3 produced by this technique may be enough for use in industrial applications.…”

Section: Discussionsupporting

confidence: 55%

See 1 more Smart Citation

In-situ production of PH3 from red phosphorus and atomic hydrogen

Umemoto

Nishihara

Ishikawa

2011

Chemical Physics Letters

View full text Add to dashboard Cite

The production of PH 3 from red phosphorus and the atomic hydrogen formed in the catalytic decomposition of H 2 on heated W surfaces was confirmed. The absolute density of the PH 3 could be as high as 10 13 cm-3 ; the density was proportional to H-atom density in the absence of red phosphorus, although three H atoms must be involved in the production of one PH 3 molecule, but showed minor dependence on the amount of red phosphorus. These results suggest that the rate-determining step for the production of PH 3 is that which produces H atoms.

show abstract

Section: Discussionsupporting

confidence: 55%

“…PH 3 is one of the most important dopant gases in semiconductor industries and has been used in many chemical vapor deposition processes [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. The problem is that PH 3 is not only highly toxic but also explosive.…”

Section: Introductionmentioning

confidence: 99%

In-situ production of PH3 from red phosphorus and atomic hydrogen

Umemoto

Nishihara

Ishikawa

2011

Chemical Physics Letters

View full text Add to dashboard Cite

show abstract

“…Boron-doped highly conducting 0.08 (Ωcm) −1 polycrystalline silicon films were optimized using HWCVD for solar cell application [2][3][4]. Thin-film solar cell fabricated on plastic substrate at 150 • C also showed the prospect of these films as a cost-effective solution [5]. In this article, we described the growth, optimization, and characterization of boron-doped polycrystalline silicon films synthesized using HWCVD.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Boron-Doped Silicon Film Using Hot Wire Chemical Vapor Deposition Technique

Hossion¹,

Arora

2020

Crystals

View full text Add to dashboard Cite

Boron-doped polycrystalline silicon film was synthesized using hot wire chemical vapor deposition technique for possible application in photonics devices. To investigate the effect of substrate, we considered Si/SiO2, glass/ITO/TiO2, Al2O3, and nickel tungsten alloy strip for the growth of polycrystalline silicon films. Scanning electron microscopy, optical reflectance, optical transmittance, X-ray diffraction, and I-V measurements were used to characterize the silicon films. The resistivity of the film was 1.3 × 10−2 Ω-cm for the polycrystalline silicon film, which was suitable for using as a window layer in a solar cell. These films have potential uses in making photodiode and photosensing devices.

show abstract

“…13,14 • Triode: Deposition conditions similar to low pressure VHF a-Si:H but with an additional biased mesh between the electrodes lead to very low deposition rate but dense material. 15,16 a-Si:H deposition techniques other than PECVD, such as sputtering, 17 hot-wire deposition, 18,19 or expanded thermal plasma deposition 20 did not lead to high solar cell efficiencies or were not commercially practical, and will not be discussed here further.…”

Section: Introductionmentioning

confidence: 99%

Comparison of amorphous silicon absorber materials: Light-induced degradation and solar cell efficiency

Stückelberger

Despeisse

Bugnon

et al. 2013

Journal of Applied Physics

View full text Add to dashboard Cite

Several amorphous silicon (a-Si:H) deposition conditions have been reported to produce films that degrade least under light soaking when incorporated into a-Si:H solar cells. However, a systematic comparison of these a-Si:H materials has never been presented. In the present study, different plasma-enhanced chemical vapor deposition conditions, yielding standard low-pressure VHF a-Si:H, protocrystalline, polymorphous, and high-pressure RF a-Si:H materials, are compared with respect to their optical properties and their behavior when incorporated into single-junction solar cells. A wide deposition parameter space has been explored in the same deposition system varying hydrogen dilution, deposition pressure, temperature, frequency, and power. From the physics of layer growth, to layer properties, to solar cell performance and light-induced degradation, a consistent picture of a-Si:H materials that are currently used for a-Si:H solar cells emerges. The applications of these materials in single-junction, tandem, and triple-junction solar cells are discussed, as well as their deposition compatibility with rough substrates, taking into account aspects of voltage, current, and charge collection. In sum, this contributes to answering the question, “Which material is best for which type of solar cell?”

show abstract

Hydrogenated amorphous and nanocrystalline silicon solar cells deposited by HWCVD and RF-PECVD on plastic substrates at 150°C

Cited by 28 publications

References 5 publications

In-situ production of PH3 from red phosphorus and atomic hydrogen

In-situ production of PH3 from red phosphorus and atomic hydrogen

Synthesis of Boron-Doped Silicon Film Using Hot Wire Chemical Vapor Deposition Technique

Comparison of amorphous silicon absorber materials: Light-induced degradation and solar cell efficiency

Contact Info

Product

Resources

About