We propose PanopticFusion, a novel online volumetric semantic mapping system at the level of stuff and things. In contrast to previous semantic mapping systems, PanopticFusion is able to densely predict class labels of a background region (stuff) and individually segment arbitrary foreground objects (things). In addition, our system has the capability to reconstruct a large-scale scene and extract a labeled mesh thanks to its use of a spatially hashed volumetric map representation. Our system first predicts pixel-wise panoptic labels (class labels for stuff regions and instance IDs for thing regions) for incoming RGB frames by fusing 2D semantic and instance segmentation outputs. The predicted panoptic labels are integrated into the volumetric map together with depth measurements while keeping the consistency of the instance IDs, which could vary frame to frame, by referring to the 3D map at that moment. In addition, we construct a fully connected conditional random field (CRF) model with respect to panoptic labels for map regularization. For online CRF inference, we propose a novel unary potential approximation and a map division strategy.We evaluated the performance of our system on the ScanNet (v2) dataset. PanopticFusion outperformed or compared with state-of-the-art offline 3D DNN methods in both semantic and instance segmentation benchmarks. Also, we demonstrate a promising augmented reality application using a 3D panoptic map generated by the proposed system.

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The catalytic decomposition processes of PH 3 on heated tungsten surfaces were studied to clarify the mechanisms governing phosphorus doping into silicon substrates. Mass spectrometric measurements show that PH 3 can be decomposed by more than 50% over 2000 K. H, P, PH, and PH 2 radicals were identified by laser spectroscopic techniques. Absolute density measurements of these radical species, as well as their PH 3 flow rate dependence, show that the major products on the catalyst surfaces are P and H atoms, while PH and PH 2 are produced in secondary processes in the gas phase. In other words, catalytic decomposition, unlike plasma decomposition processes, can be a clean source of P atoms, which can be the only major dopant precursors. In the presence of an excess amount of H 2 , the apparent decomposition efficiency is small. This can be explained by rapid cyclic reactions including decomposition, deposition, and etching to reproduce PH 3 .

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The production of PH 3 from red phosphorus and the atomic hydrogen formed in the catalytic decomposition of H 2 on heated W surfaces was confirmed. The absolute density of the PH 3 could be as high as 10 13 cm-3 ; the density was proportional to H-atom density in the absence of red phosphorus, although three H atoms must be involved in the production of one PH 3 molecule, but showed minor dependence on the amount of red phosphorus. These results suggest that the rate-determining step for the production of PH 3 is that which produces H atoms.