Hydrogen ion sensors based on indium tin oxide thin film using radio frequency sputtering system

Chiang, Jung-Lung; Jhan, Syun-Sheng; Hsieh, Shuchen; Huang, An-Li

doi:10.1016/j.tsf.2009.03.050

Cited by 48 publications

(28 citation statements)

References 17 publications

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“…The figure includes data from the present contribution as well as literature results for ZnO [11] and [22], ITO/Si [23], ITO Fig. 6b corresponding to two piled subgroups according to the area range: a below 10 mm 2 and b from 10 to 100 mm 2 /SnO 2 /Si [23], SnO 2 /ITO [21] and [24], polypyrrole / SnO 2 / ITO [24], Si 3 N 4 [25], ITO [21], and SnO 2 :F [14] and [21]. The solid line represents the theoretical Nernst sensitivity for potentiometric sensors, which is equal to 59.2 mV/pH [26].…”

Section: Resultsmentioning

confidence: 99%

Effective Area Effects on the Final Device Sensitivity of Ion Sensor Transducers

Fernandes

Mulato

2015

Braz J Phys

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Fluorine-doped tin oxide (SnO 2 :F) was used as the ion-sensing layer of an EGFET-pH sensor. The effective area affects the final results, as well as the sensor surface potential and sensitivity. The sensor miniaturization is highly required on medical applications, with that the effective area must be properly understood. Routine insertion and removal of total and partial surface areas in buffer solution were analyzed and compared. The results show that the routine changes considerable the sensor sensitivity. Variations in the double layer, Helmholtz plane, and Gouy-Chapman region play a significant role. The final sensitivities of the samples were compared with values available in the literature, even for other materials. The role that area normalization plays in quality assessment is discussed for proper future technological miniaturizations.

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Section: Resultsmentioning

confidence: 99%

Effective Area Effects on the Final Device Sensitivity of Ion Sensor Transducers

Fernandes

Mulato

2015

Braz J Phys

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“…The ambient temperature was ∆I pH7 pH12 pH = 12 → 11 → 10 → 9 → 8 → 7 pH = 12 → 11 → 10 → 9 → 8 → 7 pH = 12 → 11 → 10 → 9 → 8 → 7 pH = 12 → 11 → 10 → 9 → 8 → 7 pH = 12 → 11 → 10 → 9 → 8 → 7 controlled at 25 ± 0 1 C using a PID temperature controller. Because the channel current can be modified using a concentration of hydrogen ions, when the drain-source voltage V DS is maintained at a constant value of 0.2 V, both typical sets of I DS -V GS curves of the AZO nanorods pH-EGFET based on the Si substrates for 1, 3,6,9,12 times pretreatment are obtained, as shown in Figure 5. The I DS -V GS curves are shifted in parallel with varying electrolyte solution pH values, and become more positive with increasing pH.…”

Section: Resultsmentioning

confidence: 99%

“…We have also deposited ITO films on Si and SiO 2 /Si substrates as the sensing membranes of EGFET by RF sputtering. 9 10 applied a TiO 2 thin film on a ITO glass substrate as the sensing membrane of an EGFET pH sensor. It is found that the bilayer structure of TiO 2 /ITO EGFET exhibits good linear sensitivity from pH 1 to 11.…”

Section: Introductionmentioning

confidence: 99%

The pH Sensitivity and Characteristics of AZO Nanorods Based on the Extended-Gate Field-Effect Transistor

Chiang¹,

Tsai²,

Kao³

2015

j comput theor nanosci

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In this study, the AZO nanorods were used as pH sensor materials based on extended-gate fieldeffect transistor (EGFET) and the pH sensitivity and AZO nanostructure characteristics were investigated and discussed in the different pH buffer solutions. The aluminum-doped zinc oxide nanorods were grown by hydrothermal method. The pre-treatment procedures were included the 0.0075 M zinc acetate solution was spin-coated on Si substrates for different number of times. Secondary, the substrate was submerged horizontally in zinc nitrate hexahydrate (Zn(NO 3 2 · 6H 2 O), diethylenetriamine (DETA), and doped the solution of aluminium nitrate, nonahydrate (Al(NO 3 3 · 9H 2 O) at about 120 C for 4 h. The AZO nanorods sensing structure based on the EGFET was finished. Accordingly, the size and surface morphology of the AZO nanorods were examined by a field emission scanning electron microscope (FE-SEM), and the current-voltage characteristics curves and pH sensitivities were measured by the semiconductor parameter analyzer. The experimental results found that the morphology of AZO is that of a rod clusters and the hexagonal phase of wurtzite structures can be obtained. The smaller diameter of AZO nanorods can be obtained at 12 times pre-treatment. In addition, the superior pH sensing response in pH 7∼12 buffer solutions at 6 times pre-treatment, the pH sensitivity is very high, and the pH response is linearity.

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“…Unlike the integration of an ion selective electrode and a field-effect transistor (FET) in an ISFET, the EGFET is a structure to isolate the FET from the chemical environment, in which a sensing head is extended from the gate electrode through a signal wire. Up to the present, Manuscript most sensing membranes applied in EGFETs are metal oxides, such as zinc oxide (ZnO) [11], tin oxide (SnO 2 ) [12], indium tin oxide (ITO) [13], ruthenium oxide RuO 2 ) [14], and a mixed thin film of vanadium and tungsten oxide (V 2 O 5 /WO 3 ) [15], and these metal oxides exhibit well pH sensing characteristics in EGFETs. However, the brittleness of metal oxide might restrict their applications in the flexible and disposal sensors in future.…”

Section: Introductionmentioning

confidence: 99%

Functionalized Carbon Nanotube Thin Films as the pH Sensing Membranes of Extended-Gate Field-Effect Transistors on the Flexible Substrates

Tsai

Huang

Wang

et al. 2014

IEEE Trans. Nanotechnology

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The oxygen-plasma-functionalized carbon nanotube thin films on the flexible substrates as the pH sensing membranes of extended-gate field-effect transistors are proposed for the first time. The carbon nanotubes are ultrasonically sprayed onto the polyimide substrates followed by an oxygen-plasma functionalization. Such oxygen-plasma-treated carbon nanotube thin films (CNTFs) exhibit superior pH sensing characteristics with the sensitivity of 55.7 mV/pH and voltage linearity of 0.9996 in a wide sensing range of pH 1-13. Moreover, the excellent flexibility of carbon nanotube is also demonstrated and the oxygen-plasma-treated CNTFs still maintain the sensitivity of 53.6 mV/pH and voltage linearity of 0.9943 even after five-cycle bending test. These results reveal that the oxygen-plasma-treated CNTFs have great potentials in the practically disposal and wearable biosensor applications.Index Terms-Biosensors, carbon nanotube (CNT), extendedgate field-effect transistors (EGFETs), flexible substrates.

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Hydrogen ion sensors based on indium tin oxide thin film using radio frequency sputtering system

Cited by 48 publications

References 17 publications

Effective Area Effects on the Final Device Sensitivity of Ion Sensor Transducers

Effective Area Effects on the Final Device Sensitivity of Ion Sensor Transducers

The pH Sensitivity and Characteristics of AZO Nanorods Based on the Extended-Gate Field-Effect Transistor

Functionalized Carbon Nanotube Thin Films as the pH Sensing Membranes of Extended-Gate Field-Effect Transistors on the Flexible Substrates

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