2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano) 2012
DOI: 10.1109/3m-nano.2012.6472937
|View full text |Cite
|
Sign up to set email alerts
|

Hybrid microassembly for massively parallel assembly of microchips with water mist

Abstract: This paper proposes a hybrid microassembly technique for massively parallel assembly of 200μm × 200μm × 30μm SU-8 chips.The hybrid microassembly technique combines the robotic pick-and-place technique and water mist induced self-assembly technique. The robotic handling tool is used to place microchips roughly on chips of the same size at a fast speed, and then water mist composed of microscopic droplets is delivered to achieve high accuracy and massively parallel alignments. The results indicate the hybrid ass… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
1
0

Year Published

2014
2014
2019
2019

Publication Types

Select...
3
2

Relationship

1
4

Authors

Journals

citations
Cited by 5 publications
(1 citation statement)
references
References 12 publications
0
1
0
Order By: Relevance
“…Minimizing surface energy is the fundamental principle behind capillary self-alignment, where the gradient of the surface energy is designed to drive the microchips towards desired locations. Capillary self-alignment has been demonstrated previously, including massively parallel microassembly 7 8 9 , integration of relatively complicated 3D structures 10 11 12 , fluidic self-assembly of GaAs blocks 13 and optoelectronic devices 14 . Impressive results have been reported, e.g.…”
mentioning
confidence: 97%
“…Minimizing surface energy is the fundamental principle behind capillary self-alignment, where the gradient of the surface energy is designed to drive the microchips towards desired locations. Capillary self-alignment has been demonstrated previously, including massively parallel microassembly 7 8 9 , integration of relatively complicated 3D structures 10 11 12 , fluidic self-assembly of GaAs blocks 13 and optoelectronic devices 14 . Impressive results have been reported, e.g.…”
mentioning
confidence: 97%