2019
DOI: 10.3390/app10010240
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Hybrid External Cavity Laser with an Amorphous Silicon-Based Photonic Crystal Cavity Mirror

Abstract: The authors present results on the performance of a hybrid external cavity photonic crystal laser-comprising semiconductor optical amplifier, and a 2D photonic crystal cavity fabricated in low-temperature amorphous silicon. The authors demonstrate that lithographic control over amorphous silicon photonic crystal cavity-resonant wavelengths is possible, and that single-mode lasing at optical telecommunications wavelengths is possible on an amorphous silicon platform.

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Cited by 11 publications
(6 citation statements)
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“…Recent advances in light confinement at the wavelength scale are leading to smaller and smaller high-performance resonators fabricated on silicon-on-insulator platforms. Specifically, spherical cavities [6], toroidal cavities [7,8], and photonic crystal (PhC) cavities [9][10][11][12][13][14] offer very low optical losses [i.e., high quality (Q) factors [15]], low coupling losses [16], and small mode volumes in the range of λ 3 , and enable the investigation of cavity quantum electrodynamics [17], all-optical computing [18], lasing and parametric oscillations [19][20][21], and enhanced nonlinear processes [22,23]. The wavelength scale confinement of light in microcavities leads to a huge enhancement of the relatively small optical nonlinearities of silicon [24].…”
Section: Introductionmentioning
confidence: 99%
“…Recent advances in light confinement at the wavelength scale are leading to smaller and smaller high-performance resonators fabricated on silicon-on-insulator platforms. Specifically, spherical cavities [6], toroidal cavities [7,8], and photonic crystal (PhC) cavities [9][10][11][12][13][14] offer very low optical losses [i.e., high quality (Q) factors [15]], low coupling losses [16], and small mode volumes in the range of λ 3 , and enable the investigation of cavity quantum electrodynamics [17], all-optical computing [18], lasing and parametric oscillations [19][20][21], and enhanced nonlinear processes [22,23]. The wavelength scale confinement of light in microcavities leads to a huge enhancement of the relatively small optical nonlinearities of silicon [24].…”
Section: Introductionmentioning
confidence: 99%
“…The duplexers were fabricated using the standard CMOS compatible method 32 , 33 . To optimize fabrication tolerance and transmittance, various device configurations are employed.…”
Section: Methodsmentioning
confidence: 99%
“…2 b), on which the actual photonic components are developed. The poly:Si islands were having different sizes ranging from 10 to 1000 µm 2 , therefore able to accommodate one or multiple photonic crystal cavities to be employed as wavelength selective mirrors in hybrid external cavity lasers (HECLs) in vertical coupling configuration 31 , 32 . As the optical performances of poly:Si strongly depend on surface roughness, which dominates scattering losses, the CMP process had to be optimised to achieve the highest surface smoothness, ideally in the sub-nm range, for the photonic components to be able to have measured Q-factors at least in the 10 3 range (e.g., minimum values required to get a single-mode PhC-based lasers, as seen in 33 ).…”
Section: Fabrication and Optimisation Of The Poly:si Substrates For P...mentioning
confidence: 99%
“…The photonic crystal resonator located in the silicon islanded may be connected to other components via a waveguiding layer position vertically above. A variety of components have been demonstrated in vertically coupled configuration such as photodetectors 36 modulators 37 and lasers 32 . Such a configuration is ideally suited to this application as the interconnecting waveguides do not reduce the area available for transistors.…”
Section: Measurement Of the Fabricated Phc Cavities On Poly:simentioning
confidence: 99%