Hot-electron flux observation in large-area microwave sustained plasmas

Abstract

Articles you may be interested inRole of a metal-dielectric structure for the high-charge-state-ion production in electron cyclotron resonance ion sources Rev. Sci. Instrum. 73, 4172 (2002); 10.1063/1.1519937 High-energy electrons near the dielectric-plasma boundary in a large-area surface-wave plasma excited at 915Large-area plasma produced by surface waves on a metal wall with periodic grooves

Detection of localized hot electrons in low-pressure large-area microwave discharges

“…According to the theoretical work by Aliev et al, [7][8][9] in this plasma resonance region, a hot electron tail in the electron energy-distribution function is formed, which sustains the discharge. This prediction was supported by experimental measurements in our previous work, 14 where we reported on the appearance of a hot-electron flux directed away from the plasma-dielectric interface and its influence on plasma parameter profiles. In this work we focus on plasma parameter profiles in very low-pressure ͑Ͻ3 mTorr͒ slightly overdense discharges, where the plasma resonance region appears in an observable distance from the dielectric.…”

Study of Protein Adsorption onto a Polymer Film by in-situ UV Attenuated Total Reflectance Spectroscopy

“…The SWP sources produce a high density plasma (>10 11 cm -3 ) as a result of energy absorption of an electromagnetic wave propagating along the plasma dielectric surface [8]. In addition, a SWP can process large-area surfaces, almost at room temperature, since the main mechanism of the energy absorption is collisionless versus Joule heating.…”

“…Our work presents results about the human plasma protein adsorption onto a poly acrylic acid (PAA) film prepared by a new graft polymerization method after surface pre-treatment with a surface wave plasma (SWP) [8]. The adsorption kinetics of human plasma fibrinogen (HPF) and human serum albumin (HSA) proteins were measured by in-situ UV-ATR spectroscopy method.…”

Electron-drift detection using directional planar probes in a low-pressure coaxial surface-wave discharge

“…In the microwave regime, this mechanism is often referred to as transit time heating, in which an electron is expected to accelerate within a narrow resonance peak. This issue has been the subject of various papers, reviewing experiments and discussions about the existence of such resonances, 1 claiming the observation of hot electrons generated in resonance region, [2][3][4] or reporting measurements of the isotropic electron energy distribution function in large-area planar SW discharges. 5 This letter presents the study of coaxial SW ͑2.45 GHz͒ discharges at low pressures ͑10-100 mTorr͒, considering the possible development of electron-plasma resonances.…”