Detection of localized hot electrons in low-pressure large-area microwave discharges

Terebessy, Tibor; Kando, Masashi; Kúdela, Jozef

doi:10.1063/1.1320848

Cited by 25 publications

(15 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…These resonances result in large and sharp peaks of the electric field component parallel to the density gradient [10,11,12]. On the basis of hydrodynamic and kinetic calculations, it was proposed that the enhancement of the electric field could result in enhanced Joule heating [10] as well as the generation of fast electrons [13].…”

mentioning

confidence: 99%

Nonlocal effect of plasma resonances on the electron energy-distribution function in microwave plasma columns

et al. 2012

View full text Add to dashboard Cite

Spatially resolved trace rare gases optical emission spectroscopy was used to analyze the electron energy-distribution function (EEDF) in low-pressure argon plasma columns sustained by surface waves. At frequencies >1 GHz, in the microwave-sustained region, the EEDF departs from a Maxwellian, characterized by a depletion of low-energy electrons and a high-energy tail, whereas in the field-free zone, the EEDF is Maxwellian. Abnormal behavior of the EEDF results from the acceleration of low-energy electrons due to the conversion of surface waves into volume plasmons at the resonance point where the plasma frequency equals the wave frequency and their absorption by either collisional or Landau damping.

show abstract

mentioning

confidence: 99%

Nonlocal effect of plasma resonances on the electron energy-distribution function in microwave plasma columns

et al. 2012

View full text Add to dashboard Cite

show abstract

“…However, realistic processing plasmas should be nonuniform, at least in the vicinity of a quartz plate, which is a window for incident microwave transmission due to the existence of a plasma sheath. The non-uniformity of plasma density near a quartz plate window has been observed in several experiments [5][6][7].…”

Section: Introductionmentioning

confidence: 87%

Effects of Plasma Resonance on Surface Waves in Axially Non-Uniform Plasmas

Hōjō

Yasaka

Mase

2010

Plasma and Fusion Research

View full text Add to dashboard Cite

Surface waves were studied in cold cylindrical plasmas with axially non-uniform density profiles, and the eigenfrequencies and eigenfunctions for the transverse-magnetic modes of pure and hybrid surface waves were obtained numerically for collisional plasmas. The analysis of the wave equation takes into account the singularity caused by plasma resonance at which the wave frequency is equal to the local electron plasma frequency. It is shown that the axial eigenfunction of the pure surface mode peaks at the position of the plasma resonance layer, whereas the axial eigenfunction of the hybrid surface mode has two peaks at the plasma resonance layer and at the interface of the plasma and a quartz plate. Transverse-electric surface modes in axially non-uniform plasmas without plasma resonance are also analyzed.

show abstract

“…A microwave plasma source with a resonant cavity for a transverse magnetic (TM) wave was proposed and was observed to sustain high-density plasma. 4,5) It is considered that when TM waves are reflected close to the cut-off density, evanescent waves penetrate into the plasma and then induce resonant excitation in electron plasma waves, since TM waves have an E-field parallel to the wave vector, or a density gradient. And the microwave energy is efficiently transferred to electron plasma waves.…”

Section: Introductionmentioning

confidence: 99%

Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma

Kogoshi

Katayama

et al. 2009

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

To excite selectively transverse magnetic (TM) waves and to maximize E-field of a microwave oriented parallel to the plasma density gradient at a plasma surface, a resonant cavity was formed using an air gap between an upper conduction plate with a slot antenna (part of a waveguide) and a dielectric window of a microwave plasma source, in which a high-density plasma has been shown to act as the bottom plate of the cavity. The local maxima of plasma density have been observed experimentally when changing the air gap length. Finitedifference time-domain (FDTD) simulations and analytical studies show that two of these maxima may be due to the formation of TM 111 and TM 112 wave resonant cavities. #

show abstract

Detection of localized hot electrons in low-pressure large-area microwave discharges

Cited by 25 publications

References 13 publications

Nonlocal effect of plasma resonances on the electron energy-distribution function in microwave plasma columns

Nonlocal effect of plasma resonances on the electron energy-distribution function in microwave plasma columns

Effects of Plasma Resonance on Surface Waves in Axially Non-Uniform Plasmas

Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma

Contact Info

Product

Resources

About