2001
DOI: 10.1109/16.960381
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Horizontal current bipolar transistor (HCBT): a new concept of silicon bipolar transistor technology

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Cited by 10 publications
(4 citation statements)
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“…Fig. 2 shows the fabrication sequence for the proposed lateral PNM SCBT [2], [6]. After mesa isolation by epi-etching, a thick CVD oxide (LTO) is deposited and patterned as shown in Fig.…”
Section: Device Structure and Parametersmentioning
confidence: 99%
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“…Fig. 2 shows the fabrication sequence for the proposed lateral PNM SCBT [2], [6]. After mesa isolation by epi-etching, a thick CVD oxide (LTO) is deposited and patterned as shown in Fig.…”
Section: Device Structure and Parametersmentioning
confidence: 99%
“…This advantage of the BJT coupled with the inherent isolation available for the SOI devices led to the emergence of SOI based BiCMOS technologies where both BJTs and MOSFETs are fabricated on the same chip. However, to reduce the complexity of BiCMOS processes, which employ expensive double polysilicon complementary technologies, and also to minimize the disadvantages associated with the conventional vertical current concept [2], lateral bipolar transistors are being studied extensively [3]- [8].…”
Section: Introductionmentioning
confidence: 99%
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“…HCBT is invented at the Faculty of Electrical Engineering and Computing, University of Zagreb, Croatia, [9,10] and its characteristics has been improved over 3 generations of transistors. At first, the technology concept has been demonstrated by using coarse contact lithography having transistors of with cutoff frequency (f T ) of 4.4 GHz and collector-emitter breakdown voltage (BV CEO ) of 15.8 V [11].…”
Section: Introductionmentioning
confidence: 99%