Homoepitaxial Diamond Structures with Incorporated SiV Centers

Felgen, Nina; Naydenov, Boris; Jelezko, Fedor; Reithmaier, Johann Peter; Popov, C.

doi:10.1002/pssa.201800371

Cited by 10 publications

(8 citation statements)

References 38 publications

(43 reference statements)

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“…The realized nanopillars host single SiV centers with high spectral stability [ 55 ]. In a similar approach, pre-structured SCD pillar were coated with spin-on-glass (perhydropolysilazane) and homoepitaxially overgrown via CVD method, to obtain localized ensembles of SiV − s in the overgrown part of nanopillars [ 56 ]. Creating color centers during growth potentially enhances their spectral stability as well as spin properties by avoiding implantation induced damage (see also Section 2.5 ) [ 55 ].…”

Section: Photonic Componentsmentioning

confidence: 99%

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

2020

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In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed.

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Section: Photonic Componentsmentioning

confidence: 99%

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

2020

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“…Generally, silicon atoms are already present in most of the CVD fabricated diamond films via diffusion from a silicon-containing substrate and/or from the silica reactor windows [32]. This process creates SiV centers without further annealing and ion implantation procedures [33]. By balancing a dopant source, the depth of impurities can be controlled in this method.…”

Section: Introductionmentioning

confidence: 99%

“…The growth process generally takes place at elevated temperatures, but, upon cooling, the compressive stress resulting from the thermal expansion coefficient mismatch between the substrate and the diamond can induce structural damages to the film (28).Generally, silicon atoms are already present in most of the CVD fabricated diamond films via diffusion from a silicon-containing substrate and/or from the silica reactor windows (32). This process creates SiV centers without further annealing and ion implantation procedures (33). By balancing a dopant source, the depth of impurities can be controlled in this method.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of silicon-implanted polycrystalline diamond membranes

Kambalathmana

Flatae

Hunold

et al. 2021

Carbon

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We investigate the optical properties of polycrystalline diamond membranes containing silicon-vacancy (SiV) color centers in combination with other nano-analytical techniques. We analyze the correlation between the Raman signal, the SiV emission, and the background luminescence in the crystalline grains and in the grain boundaries, identifying conditions for the addressability of single SiV centers. Moreover, we perform a scanning transmission electron microscopy (STEM) analysis, which associates the microscopic structure of the membranes and the evolution of the diamond crystals along the growth direction with the photoluminescence properties, as well as a time-of-flight secondary ion mass spectrometry (ToF-SIMS) to address the distribution of Si in implanted and un-implanted membranes. The results of the STEM and ToF-SIMS studies are consistent with the outcome of the optical measurements and provide useful insight into the preparation of polycrystalline samples for quantum nano-optics.

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“…To yield an efficient outcoupling from the zero-phonon line (ZPL) of the color centers and improve the photon collection efficiency, various light-confining architectures can be used, such as Fabry-Pérot microcavities [30,31], nanopillars [32][33][34] or photonic crystal cavities [35]. In particular, cavities with small mode volumes and high quality factors can lead to selective and strong Purcell enhancement of the ZPL emission, an important ingredient for coherent single-photon sources, fast spin readout and an efficient creation of spin-photon entanglement.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

et al. 2020

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The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.

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Homoepitaxial Diamond Structures with Incorporated SiV Centers

Cited by 10 publications

References 38 publications

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

Optical properties of silicon-implanted polycrystalline diamond membranes

Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

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