Holographic Fabrication of 3D Nanostructures

Abstract

In this paper, the authors review the optical principles underlying the fabrication of 3D periodic nanostructures prepared using holographic lithography (HL) as well as their applications toward chemical sensors and energy storage devices using 3D functional nanomaterials. HL is potentially useful for the simple and rapid fabrication of defect‐free large‐area periodic nanostructures with various structural geometries. The use of optical elements, such as well‐designed prisms and diffraction gratings, improves the reproducibility of the manufacturing process by simplifying complicated optical setups. 3D functional nanostructures, including semiconductor and metallic nanomaterials, are useful in highly sensitive photonic crystals and plasmonic sensors, and high‐performance 3D electrodes for use in energy production and storage devices.

Atomic Layer Deposition of Inorganic Thin Films on 3D Polymer Nanonetworks

“…While DLW has great advantages in manufacturing arbitrary structures with a high resolution, it suffers from fatal drawbacks such as a very slow production speed and the development of two-photon absorbing materials that are not diversified. In this respect, MBIL, also called holographic lithography, is a precise manufacturing technique for periodic 3D nanonetwork structures, which complements the low productivity of DLW ( Figure 2d) [49][50][51][52]. The principle of MBIL is to transfer the 3D periodic intensity distribution resulting from the interference between four coherent beams separated by a single laser, to photosensitive polymer.…”

“…More information on the recent progress of the 3D nanofabrication techniques mentioned above can be found in the literature [13,30,51,[62][63][64][65][66][67][68]. Figure 3 shows the representative examples of polymer templates with a regular or irregular 3D nanonetwork structure fabricated by the above 3D nanofabrication techniques, including electrospinning, BCL, DLW, MBIL, and PnP.…”

Holography, Fourier Optics, and Beyond Photonic Crystals: Holographic Fabrications for Weyl Points, Bound States in the Continuum, and Exceptional Points

“…Since the first suggestions of photonic equivalents of electronic bandgap materials (i.e., PhCs) simultaneously by Yablonovitch and John [ 103,104 ] in 1987, much relevant research effort has been undertaken to find champion PhCs (i.e., having a complete photonic bandgap with the lowest demanding refractive index contrast). [ 105–176 ] In particular, exploiting an optimized 3D PhC lattice has been a key to this end. A diamond lattice among other lattices was found to be the best solution for a champion PhC.…”

“…Many important accomplishments have been reported in terms of 3D lattices and the resultant photonic bandgap engineering, enlarging the accessible pattern‐area, processing stability, finding easy‐to‐craft PhC lattices, and expanding the materials pallet. [ 105–176 ] However, unfortunately, these efforts to obtain an ultimate PhC and subsequent advanced holographic lithography have eventually petered out in the 2010s. This was mainly owing to a failure to achieve a perfect diamond lattice (diamond‐like woodpile lattice was the main success) and the rise of an attractive alternative class of photonic materials (e.g., topological photonic materials).…”

“…[ 4–51,178–180,207–219 ] However, it has recently been shown that holographic fabrications are readily compatible with the materialization of Weyl points, [ 166,174,197–202,220–226 ] bound states in the continuum (BIC), [ 203–206,227,228 ] and exceptional point (EP) [ 229–232 ] optical materials, which can be rationalized by full electromagnetic theory beyond analytical Fourier optics. Nevertheless, the conventional research paradigms of holographic fabrications defined by the previously reported highly reputed reviews, [ 107,108,140,149,159,216,233–237 ] are still limited to Fourier PhCs. More critically, holographic lithography and recording tend to be viewed separately for DOEs and HOEs, respectively.…”