Historical Perspective of Accelerometer Technologies

Licht, Torben Rask; Scheeper, P.R.

doi:10.1541/ieejsmas.116.256

Cited by 3 publications

(3 citation statements)

References 20 publications

(11 reference statements)

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“…We set the two amplitude parameters X 1 and X 2 to 500µm and 40µm for the experiment with a constant damping coefficient, and 50µm and 10µm for the experiment with a time-dependent damping coefficient, respectively. Although the combined errors of displacement measurements such as mechanical and electronic noises, thermal effect and nonlinearity can be in the range of 1 to 3 percent of full scale [35,38,42,50], high grade sensors can be more accurate [43,44]. We simulate two sets of errors for displacement measurements for each of the two experiments, one with a standard deviation of 1 percent of the maximum displacement and the other with a standard deviation of 0.1 percent of the maximum displacement.…”

Section: Results With Constant and Time-dependent Damping Coefficientsmentioning

confidence: 99%

“…The damping constant is given by b = 2ξω 0 m and ξ is the damping coefficient. The displacement x(t) of accelerometers can be indirectly derived by using a certain physical sensing device to measure the corresponding physical effect such as piezoresistance, capacitance, piezoelectricity, strain gauge, electron tunnelling, resonance, thermal convection and optics [4, 15,16,35,[38][39][40][41][42][43][44][45][46][47][48][49]. Huge technological advance of hardware for accelerometers has been made over more than one century, in particular, thanks to the finding of piezoresistive effect in silicon by Smith [41] and the invention of microelectromechanical system (MEMS) accelerometers by Roylance and Angell [42] (see also [15,16,35,39,40]).…”

Section: Mainmentioning

confidence: 99%

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A concept of computerized accelerometers

2023

Preprint

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Accelerometers are supposed to be physical instruments for measuring the acceleration of a moving object. Although huge technological advance is made in hardware of accelerometers over more than one century, accelerometers have been persistently designed and fabricated mechanically under the framework of forward problems of damped mass-spring systems. However, accelerometers are essentially inverse ill-posed source problems from the mathematical point of view, implying that small measurement errors of equivalent displacements are inherently amplified significantly such that accelerations output from accelerometers can become extremely noisy, numerically incorrect and physically meaningless in the case of high sampling rates. The ill-posedness of accelerometers cannot be rigorously solved mechanically but is always implicitly circumvented approximately. As a result, accelerometers theoretically can only produce approximate outputs of acceleration. Here we present the concept of computerized accelerometers in distinguishment of mechanical ones by applying regularization to compute accelerations from equivalent displacements. The acceleration is rigorously reconstructed mathematically as a solution to the inverse ill-posed source problem of acceleration. The concept of computerized accelerometers theoretically warrants precise measurement of acceleration without approximation, is valid for nonlinear damping as well and provides a turning point for accelerometers from a mechanical approximation to a fully rigorous computerized instrument.

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Section: Results With Constant and Time-dependent Damping Coefficientsmentioning

confidence: 99%

Section: Mainmentioning

confidence: 99%

A concept of computerized accelerometers

2023

Preprint

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“…Most micromachined silicon accelerometers are based on either piezoresistive or capacitive read-out, see e.g. the reviews by Licht and Scheeper [1] or Yazdi et al [2]. Usually these accelerometers are meant for large volume markets and do not exhibit very high precision.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of a piezoelectric accelerometer

Reus¹,

Gulløv²,

Scheeper³

1999

J. Micromech. Microeng.

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Zinc oxide based piezoelectric accelerometers were fabricated by bulk micromachining. A high yield was obtained in a relatively simple process sequence. For two electrode configurations a direction selectivity better than 100 was obtained for acceleration in the vertical direction and a selectivity of 3 for acceleration in the horizontal direction, respectively. The charge sensitivity in the vertical direction is better than 0.1 pC g −1 and a noise level of 1 × 10 −4 g Hz −1/2 was estimated.

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Development of a modal analysis accelerometer based on a tunneling displacement transducer

Scheeper¹,

Reynolds²,

Kenny³

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)

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Historical Perspective of Accelerometer Technologies

Cited by 3 publications

References 20 publications

A concept of computerized accelerometers

A concept of computerized accelerometers

Fabrication and characterization of a piezoelectric accelerometer

Development of a modal analysis accelerometer based on a tunneling displacement transducer

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