1996
DOI: 10.1109/20.538829
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Hillock formation-a novel approach to sputter texturing media disc substrates

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Cited by 3 publications
(1 citation statement)
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“…The area of contact between slider and disk is much smaller compared with a disk without any texturing, thereby reducing stiction during the start-up process. A lot of effort has been put into the formation, measurement, characterization and evaluation of disk surface texture [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18]. Many techniques, including laser pulse [2][3][4], sputtering [5,6], deposition [7], photolithography [8][9][10][11], chemical etching [12] and traditional lapping [13][14][15], have been developed to produce texture of nanometre-order height on the disk surface.…”
Section: Introductionmentioning
confidence: 99%
“…The area of contact between slider and disk is much smaller compared with a disk without any texturing, thereby reducing stiction during the start-up process. A lot of effort has been put into the formation, measurement, characterization and evaluation of disk surface texture [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18]. Many techniques, including laser pulse [2][3][4], sputtering [5,6], deposition [7], photolithography [8][9][10][11], chemical etching [12] and traditional lapping [13][14][15], have been developed to produce texture of nanometre-order height on the disk surface.…”
Section: Introductionmentioning
confidence: 99%