2008
DOI: 10.1002/adma.200800330
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Highly Versatile and Robust Materials for Soft Imprint Lithography Based on Thiol‐ene Click Chemistry

Abstract: As easy as “shake and bake”, the mixing and photocuring of poly‐functional thiols with alkene‐functional cross‐linkers, via thiol‐ene click chemistry, leads to materials with outstanding and tunable characteristics for soft imprint lithography. The materials are cured within 2 minutes at ambient conditions allowing stamps with high aspect ratio and sub‐100 nm features to be fabricated.

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Cited by 197 publications
(187 citation statements)
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References 28 publications
(40 reference statements)
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“…Although the PDMS mold has been diversely used for various soft-NIL processes, the resolution of the imprinted pattern with PDMS mold has been limited to >100 nm due to its relatively low modulus (∼2 MPa) [97]. To achieve about 50 nm resolution, hard PDMS (h-PDMS) with a modulus of ∼9 MPa was developed [98].…”
Section: Nil Processes Using Sol-gel Solutionsmentioning
confidence: 99%
“…Although the PDMS mold has been diversely used for various soft-NIL processes, the resolution of the imprinted pattern with PDMS mold has been limited to >100 nm due to its relatively low modulus (∼2 MPa) [97]. To achieve about 50 nm resolution, hard PDMS (h-PDMS) with a modulus of ∼9 MPa was developed [98].…”
Section: Nil Processes Using Sol-gel Solutionsmentioning
confidence: 99%
“…[17] They surveyed a variety of polymeric blends based on PEG derivatives and appropriate complementary crosslinkers to find the most suitable blends for soft imprint lithographic applications. The crosslinking of polyfunctional thiols and alkenes was carried out for two minutes in the presence of oxygen.…”
Section: Hydrogels Through Photochemical Thiol-ene Click Reactionmentioning
confidence: 99%
“…In previous studies, UV-curing silicon rubber has been prepared by thiol-ene reaction [12,13]. In addition, thiol functional groups were successfully introduced on polydimethylsiloxane (PDMS) elastomer, and the thiol-functionalized PDMS was modified with hydrophilic molecules containing enes by using the thiol-ene click reaction [14].…”
Section: Introductionmentioning
confidence: 99%