Highly transparent ITO thin films on photosensitive glass: sol–gel synthesis, structure, morphology and optical properties

Kőrösi, László; Papp, Szilvia; Beke, Szabolcs; Pécz, B.; Horváth, Róbert; Petrik, P.; Agócs, Emil; Dékány, Imre

doi:10.1007/s00339-012-6765-1

Cited by 17 publications

(5 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…ITO-based TCO films can exhibit different electro-optical, mechanical, electronic structure and composition properties depending on manufacturing technique. Many deposition techniques are used to prepare TCO coatings such as Dc and/or RF sputtering, chemical vapour deposition, reactive evaporation, molecular beam epitaxy, sol-gel method, electron beam evaporation and pulsed laser deposition [7][8][9][10][11][12][13][14]. However, the sol-gel technique has many advantages including cost effectiveness, short processing time, simplicity and the opportunity to fabricate coatings with high scalability along with the flexibility of finetuning coatings to have preferred shapes and surface areas [15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Probing the effects of thermal treatment on the electronic structure and mechanical properties of Ti-doped ITO thin films

Taha

Henry

Yin

et al. 2017

Journal of Alloys and Compounds

View full text Add to dashboard Cite

Titanium-doped indium tin oxide thin films were synthesized via a sol-gel spin coating process. Surface chemical bonding states and mechanical properties have been investigated as a function of titanium content (2 and 4 at%) and annealing temperature ranging from 400 to 600 °C with increments of 100 °C. Raman analysis was performed to study the phonon vibrations for the prepared samples and the results revealed the existence of ITO vibrational modes. The elemental compositions, bonding states and binding energies of the film materials were investigated using X-ray photoelectron spectroscopy (XPS) technique. The XPS results indicated that the ratio of the metallic elements (In, Sn, Ti) to the oxygen on the surface of the thin film coatings decreased due to the increase of the oxide layer on the surface of the thin films. Also, by increasing the annealing temperature up to 600 °C, the Ti 2p and Cl 2p signals were no longer detected for both 2 and 4 at% Ti contents, respectively, due to the thicker surface oxidation layer. Mechanical properties of the synthesized films were also evaluated using a nanoindentation process. Variations in the hardness (H) and the elastic modulus (E) were observed with different Ti at% and annealing temperatures. The hardness is within the range of 6.3–6.6 GPa and 6.7–6.8 GPa for 2 and 4 at% Ti content samples, respectively, while the elastic modulus is within the ranges of 137–143 and 139–143 GPa for 2 at% and 4 at% Ti contents samples, respectively. A combination of the highest H and E were achieved in the sample of 4% Ti content annealed at 600 °C. Furthermore, the H/E ratio ranges from 4.5 × 10−2 to 5.0 × 10−2 which reflects a reasonable level of wear resistance

show abstract

Section: Introductionmentioning

confidence: 99%

Probing the effects of thermal treatment on the electronic structure and mechanical properties of Ti-doped ITO thin films

Taha

Henry

Yin

et al. 2017

Journal of Alloys and Compounds

View full text Add to dashboard Cite

show abstract

“…[15] In addition, the symmetric spectra of both In 3d and Sn 3d indicate a single chemical state. [16] Fitting the asymmetric O 1s spectra results in two components located at 529.5 and 531.3 eV, corresponding to the bonded oxygen in the amorphous In 2 O 3 region and the oxygendeficient region of the In 2 O 3 matrix, respectively. [7] XRD pattern of sputtered ITO with a thickness of 700 nm is shown in Figure S3a, Supporting Information.…”

Section: Resultsmentioning

confidence: 99%

Ultra‐Low Resistivity Copper Mesh as Embedded Current Collector Layer for Inkjet‐Printed Flexible Electrochromic Device Realizing Fast Response and Uniform Coloration

Tang

Chen

et al. 2022

Adv Materials Technologies

View full text Add to dashboard Cite

such as bendable touch screen displays, [1] organic light-emitting diodes (OLEDs), [2] organic photovoltaics (OPVs) [3] and electrochromic devices (ECDs). [4] Among the devices mentioned above, flexible electrochromic devices (FECDs) hold great promise for versatile applications owing to the ability to change optical properties reversibly in response to applied voltages and can be attached to the curved surface due to their flexibility. [5] However, the main challenge presently for scaling up FECDs is the nonuniform coloration from the edge to the center of a large-area device during operation because of the undesirable voltage variation across the device caused by high sheet resistance of electrode material, which is mainly PET-ITO. [6] As the most widely used transparent conductive material, indium tin oxide (ITO) stands out for its high optical transmittance and chemical stability. [7] Despite the matured large-area ITO sputtering process on flexible substrates such as polyethylene terephthalate (PET) or polyimide (PI), brittleness and relatively high sheet resistance are still the two drawbacks of flexible ITO substrates which cannot be solved simultaneously because the sheet resistance of ITO film directly relates to its thickness.In order to overcome the inherent limitations of ITO-based electrodes, several alternatives have been developed as FTEs such as conducting polymers, [8] carbon materials, [5a,9] metallic nanowires, and nanostructures. [10] Notably, silver nanowire (Ag NW) has been widely studied as the electrode material for the fabrication of FECDs owing to its outstanding flexibility and simplicity for scalable processing. [4c] However, the sheet resistances of reported Ag NWs are usually limited in the range of 10 Ω □ −1 , [3a,4c,11] which is not a significant breakthrough in conductivity compared to PET-ITO (typically ≥30 Ω □ −1 without metallic modification), hindering their further applications in large-area FECDs. Considering all the FTE technologies reported so far, metal-mesh is believed to be the only technology that can easily reach a sheet resistance of less than 1 Ω □ −1 by adjusting mesh pitch, line width, and metal thickness. [12] However, owing to the high mobility of silver and the poor electrochemical stability of copper, bare Ag or Cu mesh is practically not suitable as the electrode material for traditional ECDs. [10a,13] Liu et. reported Flexible electrochromic devices (FECDs) hold great promise for energysaving static displays. As the most widely used flexible transparent electrode (FTE) material for FECDs, the indium tin oxide (ITO) coated on polyethylene terephthalate (PET-ITO) suffers from relatively high sheet resistance which can cause nonuniform coloration during the device operation, hindering the development of large-area FECDs. Herein, a hybrid FTE is developed in which an additional copper (Cu) mesh as an embedded current collector layer underneath the ITO film to achieve ultra-low sheet resistance (<0.2 Ω □ −1 ) compared to that of PET-ITO (≈35 Ω □ −1 )...

show abstract

“…It was found that porous ITO electrodes could achieve as much as 140‐fold higher roughness than flat electrodes, as measured by redox current density of adsorbed ruthenium complex, owing to increased active surface area . The method was used to deposit a conductive anti‐reflective coating as well .…”

Section: Preparation Of Porous Transparent Conductive Oxidesmentioning

confidence: 85%

Porous and Transparent Metal‐oxide Electrodes : Preparation Methods and Electroanalytical Application Prospects

et al. 2018

View full text Add to dashboard Cite

A review on the preparation methods for porous and transparent metal‐oxide electrodes is provided alongside a discussion of existing and possible electrochemical and electroanalytical applications. The elaboration routes include non‐templated particle deposition, template approaches, physical deposition methods, etching and electrospinning. Applications of such materials are mainly found in energy conversion and storage (photovoltaics, water splitting) and electroanalysis.

show abstract

Highly transparent ITO thin films on photosensitive glass: sol–gel synthesis, structure, morphology and optical properties

Cited by 17 publications

References 27 publications

Probing the effects of thermal treatment on the electronic structure and mechanical properties of Ti-doped ITO thin films

Probing the effects of thermal treatment on the electronic structure and mechanical properties of Ti-doped ITO thin films

Ultra‐Low Resistivity Copper Mesh as Embedded Current Collector Layer for Inkjet‐Printed Flexible Electrochromic Device Realizing Fast Response and Uniform Coloration

Porous and Transparent Metal‐oxide Electrodes : Preparation Methods and Electroanalytical Application Prospects

Contact Info

Product

Resources

About