2013
DOI: 10.1016/j.snb.2013.07.053
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Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide

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Cited by 212 publications
(151 citation statements)
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“…index sensors based on measurement of the spectral shifts of transmission peaks. [28][29][30][31][32][33] The phase difference between the sensing arm and the reference arm of the MZI can be expressed as…”
Section: Methodsmentioning
confidence: 99%
“…index sensors based on measurement of the spectral shifts of transmission peaks. [28][29][30][31][32][33] The phase difference between the sensing arm and the reference arm of the MZI can be expressed as…”
Section: Methodsmentioning
confidence: 99%
“…However, this structure increases the size of the biosensor. In [13], the sensing arm of the MZI based biosensor was set to be a slot waveguide structure to increase the interaction degree between the analyte and lightwave, aiming at obtaining large phase change. However, this approach increases the complexity of the waveguide design and the difficulty of the device fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…However, for the vertical slot only the quasi-TE mode confines better in the slot region, and similarly only the quasi-TM mode for the horizontal slot. Recently, research work on the use of the vertical slot waveguide to use as biosensors [22] and also to detect the DNAhybridization has been proposed in [9,23]. The sensitivity of silicon nitride vertical slot waveguide integrated with MachZehnder interferometer (MZI) can be 1864 /RIU (refractive index unit) [23].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, research work on the use of the vertical slot waveguide to use as biosensors [22] and also to detect the DNAhybridization has been proposed in [9,23]. The sensitivity of silicon nitride vertical slot waveguide integrated with MachZehnder interferometer (MZI) can be 1864 /RIU (refractive index unit) [23]. Also, the sensitivity of vertical multiple-slot waveguides has been found to be three times better than the single slot waveguide [22].…”
Section: Introductionmentioning
confidence: 99%