TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 2009
DOI: 10.1109/sensor.2009.5285780
|View full text |Cite
|
Sign up to set email alerts
|

Highly-sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

Abstract: In this paper, we report, to the best of our knowledge [1,2], the most sensitive artificial hair-based flowsensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from the cerci of crickets, one of nature's best in sensing small air flows. The presented hair sensor arrays aim to realize comparable sensitivity to nature by means of model-based design optimizations and were fabricated using advanced MEMS technologies. The presented artificial hair sensor arrays display a clear figure-of… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
7
0

Year Published

2010
2010
2016
2016

Publication Types

Select...
3
3
1

Relationship

0
7

Authors

Journals

citations
Cited by 9 publications
(7 citation statements)
references
References 6 publications
(10 reference statements)
0
7
0
Order By: Relevance
“…The best of these sensors achieved sensitivities to airflow as low as 1 mm/s [12]. In addition, the researchers were able to fabricate hundreds of hair cell units into rectangular arrays [13,20]. The arrays were mostly used to increase overall capacitance (and thus sensitivity) by connecting units in parallel.…”
Section: Liu Et Al Have Already Developed Several Generations Of Piementioning
confidence: 99%
“…The best of these sensors achieved sensitivities to airflow as low as 1 mm/s [12]. In addition, the researchers were able to fabricate hundreds of hair cell units into rectangular arrays [13,20]. The arrays were mostly used to increase overall capacitance (and thus sensitivity) by connecting units in parallel.…”
Section: Liu Et Al Have Already Developed Several Generations Of Piementioning
confidence: 99%
“…Various iterations of the basic sensor design have been tested, achieving sensitivities to air flow as low as 1 mm/s [20]. In addition, the researchers were able to fabricate hundreds of hair cell units into rectangular arrays [63,73]. The arrays, however, were mostly used to increase overall capacitance (and thus sensitivity) by connecting units in parallel.…”
Section: Mems Based Ahcsmentioning
confidence: 99%
“…Technologically it turns out to be rather difficult to make hairs with aspect ratios of more than about 10-20. We have tackled this problem by segmenting our artificial hairs with a lower part diameter of 50 µm and a top part diameter of 25 µm, reducing the hair inertial moment by about 65 % [14].…”
Section: B Hair Diameter and Viscous Dragmentioning
confidence: 99%