Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon

Alcheikh, Nouha; Hajjaj, Amal Z.; Younis, Mohammad I.

doi:10.1016/j.sna.2019.111652

Cited by 41 publications

(18 citation statements)

References 26 publications

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“…In recent years, microelectromechanical systems (MEMS) have increasingly attracted the attention of researchers for various applications, such as ltering 1 , signal processing 9 , energy harvesting 10 , and environmental sensors including magnetic, pressure [2][3][4] , accelerometer 5 , temperature 6 , ow 7 , and gas 8 . Magnetic eld micro-sensors have been explored for various potential applications, such as magnetocardiography (MCG), magnetoencephalography (MEG), biomedical, inertial navigation systems, electronic compasses, telecommunications, and non-destructive testing [11][12][13][14][15] .…”

Section: Introductionmentioning

confidence: 99%

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Alcheikh

Mbarek

Ouakad

et al. 2021

Sensors and Actuators A: Physical

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We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an inplane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing and the device is operating at atmospheric pressure. The magnetometer demonstrates a sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a good linearity in wide range and low power consumption around 0.2 mW. The above performances make the proposed micro-sensor promising for various low-cost magnetic applications.

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Section: Introductionmentioning

confidence: 99%

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Alcheikh

Mbarek

Ouakad

et al. 2021

Sensors and Actuators A: Physical

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“…The expected robustness during operation is outlined and possible improvements are proposed. Alcheikh et al [29] develop a highly sensitive resonant pressure sensor based on tracking multiple modes of vibration of curved resonators. Extensive data and simulations are reported.…”

Section: Introductionmentioning

confidence: 99%

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

et al. 2021

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This work investigates the dynamics of a microbeam-based MEMS device in the neighborhood of a 2:1 internal resonance between the third and fifth vibration modes. The saturation of the third mode and the concurrent activation of the fifth are observed. The main features are analyzed extensively, both experimentally and theoretically. We experimentally observe that the complexity induced by the 2:1 internal resonance covers a wide driving frequency range. Constantly comparing with the experimental data, the response is examined from a global perspective, by analyzing the attractor-basins scenario. This analysis is conducted both in the thirdmode and fifth-mode planes. We show several metamorphoses occurring as proceeding from the principal resonance to the 2:1 internal resonance, up to the final disappearance of the resonant and non-resonant attractors. The shape and wideness of all the basins are examined. Despite they are progressively eroded, an appreciable region is detected where the compact cores of the attractors involved in the 2:1 internal resonance remain substantial, which allows effectively operating them under realistic conditions. The dynamical integrity of each resonant branch is discussed, especially as approaching the bifurcation points where the system becomes more vulnerable to the dynamic pull-in instability.

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“…One should mention that the veering phenomenon was also investigated for slightly curved double clamped CNTs (Sazonova et al 2004;Ouakad and Younis 2011). More recently, Hajjaj and co-authors (Ramini et al 2016a;Hajjaj et al 2017a, b;Alcheikh et al 2019) investigated the veering phenomenon experimentally and theoretically in the case of MEMS arc resonators electrostatically actuated and electrothermally tuned and demonstrated it in sensing and filtering applications. Tuning the axial load of arch resonators leads to the monitoring of the ratio between different vibration modes.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear size-dependent modeling and dynamics of nanocrystalline arc resonators

Hajjaj

Ortiz

Abdelkefi

2021

Int J Mech Mater Des

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The adequate modeling of the micro/nano arc resonators' dynamics is vital for their successful implementation. Here, a size-dependent model, wherein material structure, porosity, and micro-rotation effects of the grains are considered, is derived by combining the couple stress theory, multi-phase model, and the classical Euler–Bernoulli beam model, aiming to characterize the frequency tunability of micro/nano arc resonators as monitoring either the axial load or the electrostatic force for the first time. The arc dimensions are optimized to show various phenomena in the same arc, namely snap-through, crossing, and veering. The first three natural frequencies are monitored, showing the size dependency on the frequency tuning, snap-through/back, and pull-in instability as shrinking the scale from micro- to nano-scale. Significant changes in the static snap-through and pull-in voltages and the resonance frequencies were shown as scale shrinks. A dynamic analysis of the resonator's vibration shows a dramatic effect of the size-dependency as shrinking dimensions around the veering zone.

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Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon

Cited by 41 publications

References 26 publications

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

Nonlinear size-dependent modeling and dynamics of nanocrystalline arc resonators

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