2015
DOI: 10.1002/adma.201502973
|View full text |Cite
|
Sign up to set email alerts
|

Highly Robust Transparent and Conductive Gas Diffusion Barriers Based on Tin Oxide

Abstract: Transparent and electrically conductive gas diffusion barriers are reported. Tin oxide (SnOx ) thin films grown by atomic layer deposition afford extremely low water vapor transmission rates (WVTR) on the order of 10(-6) g (m(2) day)(-1) , six orders of magnitude better than that established with ITO layers. The electrical conductivity of SnOx remains high under damp heat conditions (85 °C/85% relative humidity (RH)), while that of ZnO quickly degrades by more than five orders of magnitude.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

4
97
0

Year Published

2016
2016
2020
2020

Publication Types

Select...
8
1

Relationship

3
6

Authors

Journals

citations
Cited by 84 publications
(101 citation statements)
references
References 34 publications
4
97
0
Order By: Relevance
“…Please note the drop of water shows some better wetting on top of the hydrophilic ALD layer, but neither the optical image nor XRD indicate the presence of PbI 2 after the drop has dried. Previously, we have quantified the water vapor transmittance rate (WVTR) of similar ALD‐grown SnO x layers to be on the order of 10 −5 g m −2 d −1 , which is comparable to that of excellent permeation barriers used for the encapsulation of organic electronics …”
Section: Cell Characteristics Of Representative Solar Cells With Agnwmentioning
confidence: 91%
“…Please note the drop of water shows some better wetting on top of the hydrophilic ALD layer, but neither the optical image nor XRD indicate the presence of PbI 2 after the drop has dried. Previously, we have quantified the water vapor transmittance rate (WVTR) of similar ALD‐grown SnO x layers to be on the order of 10 −5 g m −2 d −1 , which is comparable to that of excellent permeation barriers used for the encapsulation of organic electronics …”
Section: Cell Characteristics Of Representative Solar Cells With Agnwmentioning
confidence: 91%
“…At a substrate temperature of 80 °C the growth rate per cycle was 1.1 Å. Further details on the materials properties of the SnO x can be found in our earlier work2327. Ag (100 or 10 nm) layers were thermally evaporated in high vacuum (10 −7  mbar).…”
Section: Methodsmentioning
confidence: 99%
“…However, these ALD layers were not a functional part of a device, and therefore most of the experiments were based on electrical insulators like Al 2 O 3 . SnO x layers grown by ALD are optically highly transparent, electrically conductive and provide outstanding gas permeation barrier properties with a water vapour transmission rate as low as 7 × 10 −5  g (m −2  day −1 ), even when grown at a low temperature23. Their water vapour transmission rate is orders of magnitude better than that of sputtered ITO thin films or that of solution processed metal oxide layers.…”
mentioning
confidence: 99%
“…[10,11] Several passivation approaches for OTFTs using organic and inorganic materials have been reported. [8,13] Other inorganic (SnO 2 , [14] Al 2 O 3 [15] ) and organic (tetratetracontane) [16] passivation materials for OTFTs based on the vacuum process have also been reported. [12] Until now, the soluble organic material used for OTFT passivation (as the first passivation layer in contact with the semi-conducting layer) has been water-based PVA, because only polar protic solvents like water may less damage the crystalline structure of organic semiconductor layers.…”
Section: Introductionmentioning
confidence: 99%