Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors

Yue, Wenjing; Gao, Song; Kim, Eun-Soo; Choi, Duk‐Yong

doi:10.1002/lpor.201600285

Cited by 84 publications

(45 citation statements)

References 42 publications

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“…To achieve an ultimate solution, we revisited the Si metasurfaces. From the material side, silicon is extremely stable and compatible to the modern CMOS technologies, naturally matching the requirements on mass-manufacturability and long-time durability [18][19][20][32][33][34] . The sophisticated design on nanostructures gives the possibility of concealing its shortage and improving the color impression 20,[35][36][37] .…”

Section: Resultsmentioning

confidence: 99%

All-dielectric metasurface for high-performance structural color

et al. 2020

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The achievement of structural color has shown advantages in large-gamut, high-saturation, high-brightness, and high-resolution. While a large number of plasmonic/dielectric nanostructures have been developed for structural color, the previous approaches fail to match all the above criterion simultaneously. Herein we utilize the Si metasurface to demonstrate an all-in-one solution for structural color. Due to the intrinsic material loss, the conventional Si metasurfaces only have a broadband reflection and a small gamut of 78% of sRGB. Once they are combined with a refractive index matching layer, the reflection bandwidth and the background reflection are both reduced, improving the brightness and the color purity significantly. Consequently, the experimentally demonstrated gamut has been increased to around 181.8% of sRGB, 135.6% of Adobe RGB, and 97.2% of Rec.2020. Meanwhile, high refractive index of silicon preserves the distinct color in a pixel with 2 × 2 array of nanodisks, giving a diffraction-limit resolution.

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Section: Resultsmentioning

confidence: 99%

All-dielectric metasurface for high-performance structural color

et al. 2020

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“…Choosing a convenient illumination geometry, where the light of a white LED is coupled within the glass slide, only the fundamental modes of the Mie resonators are illuminated and can out couple the light from the slab. This is due to the larger coupling of these resonances with the substrate with respect to higher order multipolar modes that are more strongly confined within the pillars and do not appear in the spectra. This property provides sharp band‐pass filters potentially important for the use of these devices as ink‐free colors and displays, although in this case a large dynamic tuning of the structural color is not possible.…”

Section: Discussionmentioning

confidence: 99%

“…Top‐down fabrication approaches limit the full exploitation of Mie resonators for unexpensive devices and broad areas production. In particular, given the rapidly rising interest in structural coloring and light filtering with dielectric metasurfaces a versatile and scalable method is highly desirable to overcome the gap separating mere proof of principles and industrial applications. In this framework, a major step forward would be the development of fabrication techniques fully compatible with back‐end processing of C‐MOS circuitry (e.g., keeping the maximal processing temperature below ≈450 °C) or more generally, on electronic devices such as LEDs and photovoltaic panels.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional Metasurfaces Based on Direct Nanoimprint of Titania Sol–Gel Coatings

Checcucci

Bottein

Gurioli

et al. 2019

Advanced Optical Materials

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shaping, [12][13][14] sensing, [15,16] and nonlinear phenomena [17][18][19][20] are few examples demonstrating the strength of this approach for light management with sub-wavelength dielectric structures. However, with a few exceptions based on colloidal assembly, [21][22][23] hydrothermal growth, [20] solid state dewetting, [24][25][26][27][28][29][30] and aerosol spray, [31] most of these achievements were based on complex and expensive fabrication methods involving several steps (such as e-beam lithography and reactive ion etching). Top-down fabrication approaches limit the full exploitation of Mie resonators for unexpensive devices and broad areas production. In particular, given the rapidly rising interest in structural coloring and light filtering with dielectric metasurfaces [32][33][34][35][36][37][38][39][40][41] a versatile and scalable method is highly desirable to overcome the gap separating mere proof of principles and industrial applications. In this framework, a major step forward would be the development of fabrication techniques fully compatible with back-end processing of C-MOS circuitry (e.g., keeping the maximal processing temperature below ≈450 °C) or more generally, on electronic devices such as LEDs and photovoltaic panels.So far, most studies on Mie resonators are based on Si or Ge materials, due to both their very large index of refraction and the possibility to exploit the well-developed nanofabrication approaches of nanoelectronics and nanophotonics. Among other materials, TiO 2 (titania) is recently attracting growing interest [35,[42][43][44][45][46] for its transparency up to near-UV frequencies and its relatively high refractive index. Indeed, TiO 2 -based Mie resonators systems can potentially outperform conventional Si and Ge-based dielectric metasurfaces, which suffer from larger absorption at short wavelength [47,48] (e.g., at 450 nm: n TiO2 = 2.55, k TiO2 = 1.2 × 10 −5 ; n Si = 4.5; k Si = 0.13; n Ge = 4; and k Ge = 2.24). A quite unique peculiarity of titania is the tunable porosity (adjustable by modifying the sol-gel fabrication process) and therefore permeability to liquids and gas. In addition to this, titania is an abundant, cheap, nontoxic, photocatalytic, mechanically strong, and chemically stable material, featuring a relatively low mass density (≈3.8 g cm −3 in the anatase form against ≈5 g cm −3 for MoS 2 ). These features make titania an ideal metamaterial providing several functions (e.g., tunable structural color, sensing small changes in the environment), for a novel photonic platform in view of multifunctional devices. Dielectric Mie resonators are taking momentum in the last years thanks to their peculiar properties in light management at visible and near-infrared frequencies. However, their full exploitation demands for cheap materials and versatile fabrication methods, extendible over large surfaces and potentially C-MOS compatible. Here, a sol-gel deposition and nanoimprint lithography method is used to obtain titania-based Mie resonators over large areas (s...

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“…Compared to traditional pigments, metasurfaces provide high spatial resolution, durable and single material colors, which show a profound commercial value in high‐resolution color printing, imaging, biosensing, and so on . Plasmonic metasurfaces with gold, silver, or aluminum nanostructures have been widely used for the realization of structure colors . However, the absorption losses, low resonance quality factors, prohibitive cost, and limited stability of plasmonics metasurfaces prevent them to the generation of structural colors with high color purity.…”

Section: D Manipulation Of Optical Waves With Metasurfacesmentioning

confidence: 99%

From Single‐Dimensional to Multidimensional Manipulation of Optical Waves with Metasurfaces

et al. 2019

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given refractive indices. The limited refractive indices of natural materials prevent the generation of new optical phenomena. The size and weight of traditional optical devices also prevent optical system miniaturization and integration. Nowadays, there is an everincreasing demand for new approaches to implement the effective manipulation of optical waves in different dimensions and to get the novel optical devices on demand.With the development of nanofabrication technology, artificial nanostructures become approachable which offer a promising solution to the achievement of efficient manipulation of optical waves in different dimensions. Metamaterials, which attain their optical functionalities from the subwavelength structures rather than their constitutive materials, provided intriguing possibilities for the evolution of modern optics and have attracted great interest from the scientific community over the past twenty years. [1][2][3] By judiciously modulating their subwavelength structure parameters, the effective values of the permeability and permittivity of the metamaterials can be designed on purpose to realize the manipulation of optical waves in a spectific dimension and to get the desirable optical functionalities, which are even not achievable with natural materials. Previous works have demonstrated that metamaterials can be widely applied in realizing negative refractive index, [4][5][6] electromagnetic invisibility cloaks, [7,8] optical black holes, [9] chiral media, [10,11] and so on. However, the commercialization of metamaterial-based optical devices in real applications is still challenging, which we ascribe to the strong dispersion and high losses associated with typically used metallic structures, and also the difficult and costly fabrication for 3D designs.Recently, planar metamaterials or metasurfaces have received great attention for their advantages to meet these challenges. [12][13][14] Compared to metamaterials, metasurfaces, as artificial planar designs, have dramatically reduced the fabrication complexity. Moreover, the thickness of metasurfaces is less than or similar to the wavelength of operating waves, which results in the reduction of the undesirable losses and offers an effective manner for implementing tunable and reconfigurable optical devices. Overall, metasurfaces provide an effective way to overcome the challenges in metamaterials, and it has been successfully proven that metasurfaces are more feasible for the engineering of the fundamental dimensions of optical Metasurfaces, 2D artificial arrays of subwavelength elements, have attracted great interest from the optical scientific community in recent years because they provide versatile possibilities for the manipulation of optical waves and promise an effective way for miniaturization and integration of optical devices. In the past decade, the main efforts were focused on the realization of single-dimensional (amplitude, frequency, polarization, or phase) manipulation of optical waves. Compared to the metasurfaces with sing...

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Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors

Cited by 84 publications

References 42 publications

All-dielectric metasurface for high-performance structural color

All-dielectric metasurface for high-performance structural color

Multifunctional Metasurfaces Based on Direct Nanoimprint of Titania Sol–Gel Coatings

From Single‐Dimensional to Multidimensional Manipulation of Optical Waves with Metasurfaces

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