Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Guzmán, Pablo; Dinh, Toan; Phan, Hoang‐Phuong; Joy, Abbin Perunnilathil; Qamar, Afzaal; Bahreyni, Behraad; Zhu, Yong; Rais‐Zadeh, Mina; Li, Huaizhong; Nguyen, Nam‐Trung; Dao, Dzung Viet

doi:10.1016/j.matdes.2020.108922

Cited by 13 publications

(11 citation statements)

References 36 publications

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“…[66] frequency tuning can also be achieved through a combination of the residual stress resulting from growth of nanofilms and the Joule heating effect. [69] For example, the residual stress between SiC nanofilm and Si substrate can cause buckling in the out-of-plane direction, [70] with increasing thickness reducing the impact of buckling. Residual stress in SiC/Si nano thin films has been demonstrated to increase the resonant frequency and quality factor.…”

Section: Frequency Tuning In Mmr Sensorsmentioning

confidence: 99%

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Dinh,

Rais‐Zadeh,

Nguyen

et al. 2023

Adv Materials Technologies

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Driving a micro and nanomechanical structure to resonance and observing its resonant motion in the physical world have led to numerous fundamental discoveries in physics, sciences, chemistry, biology, and engineering, as well as device commercialization. Scaling down mechanical structures from micrometric to nanometric size has enabled the utilization of resonant motions to probe material properties and various dynamical phenomena in quantum coherence and squeezing. Recent advances in material sciences and nanofabrication resulted in successful demonstration of ultra‐high frequency operation (GHz range) and ultra‐high quality factor (10 billion) micromachined mechanical resonators (MMRs). The resonant motion of these structures has been utilized as an indispensable tool to weigh biological and chemical species at resolution of atomic mass unit, sense a force as small as zepto‐newton, and to detect numerous other physical parameters. Here, a systematic view on the resonant sensing transduction is provided, underlying physics, and sensing structures realized with micro/nano‐electromechanical systems (MEMS/NEMS) technologies. It is also describe the roles of nanomaterials and structures, nano‐fabrication and rational designs on the resonance frequency and quality factor of MMRs toward high‐performance sensing. This paper discusses the most recent advances in the development of MMRs for material characterization as well as biological, chemical, and physical sensing. Finally, the paper discusses the challenges and perspectives on design, fabrication, and developments of resonant sensors with high quality factor toward quantum sensing, and ultra‐high sensitivity and resolution for classical sensing applications.

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Section: Frequency Tuning In Mmr Sensorsmentioning

confidence: 99%

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Dinh,

Rais‐Zadeh,

Nguyen

et al. 2023

Adv Materials Technologies

Self Cite

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“…At the same time, a double clamped cantilever beam, which can be used with DC bias tuning the resonance frequency as shown in Figure 5 b,c [ 47 ]. In order to solve the problem of thermal expansion coefficient mismatch, Guzman et al proposed to use SiC as an independent resonance and heating element to achieve frequency tuning [ 57 ]. For cantilever beams with strong magnetic and electrical coupling, the piezoelectric voltage caused by the strain enhances multiferroic signal transduction.…”

Section: Research On Resonance Performancementioning

confidence: 99%

The Recent Progress of MEMS/NEMS Resonators

et al. 2021

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MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

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“…In a review article published in 2016, Wood et al summarized the literature on 3C-SiC resonators concluding that they are good alternatives to Si for developing MEMS-based oscillators [141]. Recent publications on 3C-SiC MEMS resonators report the fabrication and testing of monocrystalline 3C-SiC on SOI electrostatic MEMS resonators [142] and a highly doped 3C-SiC bridge resonator [143]. The piezoresistive pressure sensors are, another type of MEMS sensor, commonly developed using CVD SiC films.…”

Section: Sic Memsmentioning

confidence: 99%

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

Fraga

Pessoa

2020

Micromachines

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A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD processes. In this respect, atomic layer deposition (ALD), a modified CVD process promising for nanotechnology fabrication techniques, has attracted attention due to the deposition of thin films at low temperatures and additional benefits, such as excellent uniformity, conformability, good reproducibility, large area, and batch capability. This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In addition, we summarize the applications of CVD SiC films in MEMS/NEMS devices and prospects for advancement of the CVD SiC technology.

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Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Cited by 13 publications

References 36 publications

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

The Recent Progress of MEMS/NEMS Resonators

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

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