“…1,4 Zinc oxide is easily deposited by atomic layer deposition (ALD) at low temperatures (<200 C) using diethyl zinc (DEZ) and water, [1][2][3][4][5] and adding cycles of trimethylaluminum (TMA), trimethylgallium, or trimethylindium to the ALD sequence leads to Al-doped ZnO (AZO), 1,4 Ga-doped ZnO, 4,6 or In-doped ZnO, 6,7 respectively. 8 Nylon-6 is an attractive example nonwoven substrate, in part, because it does not begin to melt until $215 C. 9 Previous reports demonstrate ZnO ALD on various polymer fiber substrates including nylon-6, 10-12 cotton, 13 paper, 13 polypropylene, 5,12-14 polyethylene terephthalate, 14 polybutylene terephthalate, 15 polylactic acid, 16 and polyacrylonitrile. 3 For conductive coatings on polymer fibers, nonwoven fiber mats are highly versatile because they can be produced in high volume at low cost, in many polymer chemistries, and offer control over fiber geometry, fiber diameter (10 lm to <100 nm), web density, and specific surface area.…”