2009
DOI: 10.1021/am900252v
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Highly Condensed Epoxy−Oligosiloxane-Based Hybrid Material for Transparent Low-k Dielectric Coatings

Abstract: A highly condensed epoxy-oligosiloxane resin was synthesized using a sol-gel condensation reaction of (3-glycidoxypropyl)trimethoxysilane and diphenylsilanediol in the presence of solvent. A higher degree of condensation and a larger molecular size of oligosiloxanes were achieved compared to a condensation reaction without the addition of a solvent. The epoxy-hybrimer coating film was fabricated by the spin coating and thermal curing of the synthesized oligosiloxane resin. The leakage current density and the d… Show more

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Cited by 27 publications
(22 citation statements)
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“…Given these characteristics, they have been studied for potential optical materials or electronic packaging materials. [8][9][10][11][12][13] Vinyl-oligosiloxane-based hybrid materials have been fabricated in previous studies by hydrosilylation. 5 The hybrimers have excellent transparency and a relatively higher refractive index (around 1.56) compared to conventional methyl-type silicone materials ($1.4).…”
Section: Introductionmentioning
confidence: 99%
“…Given these characteristics, they have been studied for potential optical materials or electronic packaging materials. [8][9][10][11][12][13] Vinyl-oligosiloxane-based hybrid materials have been fabricated in previous studies by hydrosilylation. 5 The hybrimers have excellent transparency and a relatively higher refractive index (around 1.56) compared to conventional methyl-type silicone materials ($1.4).…”
Section: Introductionmentioning
confidence: 99%
“…The broad peak at 3400 cm -1 (Si-OH from the hydrolysis) and the band at 1150-1000 cm -1 (Si-O-Si) appear at FTIR spectra of G x D y , which indicates the occurrence of the hydrolysis and condensation of GPTMS and DMDES. Figure 3 presents the 29 Si NMR spectra of G x D y , the peaks at about -12, -20, -49, -58, and -68 ppm belong to SiO-Si-OH (D 1 ), SiO-Si-OSi (D 2 ), SiO-Si-(OH) 2 (T 1 ), (SiO) 2 -Si-OH (T 2 ) and Si-(OSi) 3 (T 3 ), [24][25][26] respectively, which indicates the completion of the hydrolysis and the occurrence of condensation of GPTMS and DMDES. The G 6 D 4 have the highest content of Si-(OSi) 3 (T 3 ), which can be interpreted that the content of Si-(OSi) 3 (T 3 ) in G x D y depended on the degree of condensation (DOC) and the content of GPTMS part in G x D y .…”
Section: Resultsmentioning
confidence: 99%
“…23,24 GPC: The molecular weight and polydispersity index of the polymers were determined on a Waters 1515-2414 gel permeation chromatography (GPC, Waters, USA) with cali- bration by polystyrene standards, and the measurements were carried out at 35 o C with tetrahydrofuran as the eluent at the rate of 1.0 mL min -1 . DSC: The differential scanning calorimetry (DSC) measurements were performed on a Pyris-1 thermal analysis apparatus (Diamond DSC, Perkin-Elmer, USA) in a dry nitrogen atmosphere.…”
Section: Introductionmentioning
confidence: 99%
“…The content of experimented ES, FS, and DS was 35, 5, and 60 mol% of entire precursor, and the amount of Ba(OH) 2 H 2 O was 0.2 mol% of entire precursor. The molar ratio of ES and FS to DS was decided to be 2:3 in order to synthesize highly condensed FEO resin 40. FS, ES, DS, and Ba(OH) 2 ·H 2 O were reacted in a two‐neck flask with a magnetic stirrer under 80 °C with N 2 gas purging for 4 h.…”
Section: Methodsmentioning
confidence: 99%