1995
DOI: 10.1109/68.384532
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Highly compact optical waveguides with a novel pedestal geometry

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Cited by 15 publications
(3 citation statements)
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“…The timedomain finite-element software used in the present research has been applied by other investigators to a number of systems of practical interest, including the determination of lightscattering properties of features on silicon wafers 16 and evaluation of the performance of integrated optical devices 17 and waveguides. [18][19][20] The finite-element models in the present study are constructed in Cartesian coordinate systems by specifying edge dimensions, the finite-element mesh density, particle position(s) and shape(s), and the optical properties of the constituent materials at the wavelength of interest. Typical models contain 1-2 million elements.…”
Section: (1) Finite-element Approachmentioning
confidence: 99%
“…The timedomain finite-element software used in the present research has been applied by other investigators to a number of systems of practical interest, including the determination of lightscattering properties of features on silicon wafers 16 and evaluation of the performance of integrated optical devices 17 and waveguides. [18][19][20] The finite-element models in the present study are constructed in Cartesian coordinate systems by specifying edge dimensions, the finite-element mesh density, particle position(s) and shape(s), and the optical properties of the constituent materials at the wavelength of interest. Typical models contain 1-2 million elements.…”
Section: (1) Finite-element Approachmentioning
confidence: 99%
“…The high hole mobility of Ge has a large potential for high-speed heterobipolar Ge/GaAs transistors, 11 strong absorption in the 1.0-1.5 m range explains why the Ge-GaAs system is widely used in solar cells, 12 and transparency in the midinfrared 3-10 m range makes it a good waveguide in GaAs-based integrated electro-optics. [13][14][15] In view of such promising features of Si/GaAs and Ge/ GaAs heterostructures, and the strong interrelation between the growth microstructures and their physical properties, there are surprisingly few publications concerned with the detailed analysis of their respective growth characteristics. 16 -22 Bratina et al 18 have used molecularbeam epitaxy to grow Si on GaAs͑001͒-͑2ϫ4͒ ͑prepared by oxide desorption at 580°C at As 4 overpressure͒, and found that a ͑3ϫ1͒-reconstructed Si layer grew two-dimensionally up to 3-4 monolayers, after which initiation of threedimensional ͑3D͒ growth was detected in reflection highenergy electron diffraction ͑RHEED͒.…”
Section: Introductionmentioning
confidence: 99%
“…The heteroepitaxial growth of Ge on GaAs substrate has been investigated for applications such as solar cells, 7 heterobipolar transistors, 8 and waveguides for electro-optic integrated circuits. 9 However, there is no demonstration of MOS devices on a thin layer of Ge formed on GaAs. For MOS device application, the as-grown Ge epi layer should meet the following criteria ͑i͒ it must have excellent single crystalline quality and be free of dislocations and defects, ͑ii͒ it should be very flat because large surface roughness in the channel region can degrade the effective carrier mobility, and ͑iii͒ the Ge layer should be relatively thin to avoid the lithography issue because of the different depths of focus.…”
mentioning
confidence: 99%