Highly accurate optical µCMM for measurement of micro holes

Zangl, Kerstin; Danzl, Reinhard; Helmli, Franz; Prantl, Manfred

doi:10.1016/j.procir.2018.05.098

Cited by 14 publications

(9 citation statements)

References 6 publications

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“…In this review, optical microprobe systems were not treated. Optical micro-CMMs that use the principle of point autofocus and focus variation are rapidly developing [148][149][150]. The optical measurement of steep surfaces is progressing.…”

Section: Discussionmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Discussionmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…The disparity map obtained by this method was converted into actual distances or thickness on the basis of the geometric parameters of the imaging system. To evaluate the accuracy of the depth estimation, we used a commercial focus-variation microscope (InfiniteFocus G5plus, Bruker Alicona) 43 to measure the ground truth of the depth map for the circuit board in Fig. 6 .…”

Section: Methodsmentioning

confidence: 99%

“…6e ). Commercial focus-variation microscopy 43 was used to obtain ground-truth measurements, which took approximately half an hour to cover the whole depth range (Fig. 6f and Extended Data Fig.…”

Section: D Imaging and Industrial Inspectionmentioning

confidence: 99%

An integrated imaging sensor for aberration-corrected 3D photography

Guo

Deng

et al. 2022

Nature

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Planar digital image sensors facilitate broad applications in a wide range of areas1–5, and the number of pixels has scaled up rapidly in recent years2,6. However, the practical performance of imaging systems is fundamentally limited by spatially nonuniform optical aberrations originating from imperfect lenses or environmental disturbances7,8. Here we propose an integrated scanning light-field imaging sensor, termed a meta-imaging sensor, to achieve high-speed aberration-corrected three-dimensional photography for universal applications without additional hardware modifications. Instead of directly detecting a two-dimensional intensity projection, the meta-imaging sensor captures extra-fine four-dimensional light-field distributions through a vibrating coded microlens array, enabling flexible and precise synthesis of complex-field-modulated images in post-processing. Using the sensor, we achieve high-performance photography up to a gigapixel with a single spherical lens without a data prior, leading to orders-of-magnitude reductions in system capacity and costs for optical imaging. Even in the presence of dynamic atmosphere turbulence, the meta-imaging sensor enables multisite aberration correction across 1,000 arcseconds on an 80-centimetre ground-based telescope without reducing the acquisition speed, paving the way for high-resolution synoptic sky surveys. Moreover, high-density accurate depth maps can be retrieved simultaneously, facilitating diverse applications from autonomous driving to industrial inspections.

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“…However, various instruments are capable of imaging and obtaining topography information from surfaces with slope angles well outside the specular acceptance cone, without repositioning the sample or instrument. This capability is attributed to the capture and detection of diffuse and back-scattered light from the microstructures found on the surface slopes [14][15][16][17] , which is possible due to recent advances in instrument technology and design. For a coherence scanning interferometry (CSI) instrument, high dynamic range measurement of parts with wide reflectance ranges can be performed through the alternation of light levels during a measurement or between sequential measurements, and dynamic noise reduction for detection of weak signals can be achieved through signal oversampling [17][18][19] .…”

Section: Introductionmentioning

confidence: 99%

Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit

Thomas

Su²,

Groot³

et al. 2020

Optics and Photonics for Advanced Dimensional Metrology

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Engineered functional surfaces often feature varying slopes on macro-and micro-scales. When surfaces are mirror-like, the highest surface slope that can be measured by a far-field 3D imaging optical surface measuring instrument is the arcsine of the numerical aperture (NA) of the objective lens, i.e. the acceptance angle of the lens. However, progress in instrument design has allowed for measurement of non-specular surfaces with slopes steeper than this "traditional" NA limit. Nonetheless, there is currently a lack of understanding about the instrument response to surfaces with steep slopes beyond this limit. It is unclear over what surface spatial frequencies we can expect to accurately report fine surface-feature details.Here we present results demonstrating the capability of a commercial coherence scanning interferometer for measuring surface topography of a roughened flat and a blazed grating with tilt angles greater than the NA slope limit. We show that the surface form, i.e. the tilted plane, can be measured correctly. But, while surface texture information that can appear useful is also obtained, tilting significantly influences the measurement accuracy of micro-scale texture, and for asymmetric gratings, can depend on the tilting direction. A simplified surface scattering model suggests that the loss of scattered power captured by the instrument and a low signal-to-noise ratio causes the reduction of measurement accuracy. However, a rigorous three-dimensional instrument model is needed for a full understanding; we will develop this in our future work.

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Highly accurate optical µCMM for measurement of micro holes

Cited by 14 publications

References 6 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

An integrated imaging sensor for aberration-corrected 3D photography

Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit

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