High voltage resonant converter to generate plasma in open air

Villegas, P.; Martín-Ramos, J.A.; Pernia, A.M.; Prieto, M.J.; Fernández, David Blanco; Marcos-Robredo, G.

doi:10.23919/epe.2019.8915423

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2021

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“…Various researchers have proved that a single-stage LLC resonant converter [65], [66], an LCC resonant converter [67], [68], a semi-soft switching converter [69], [70] or a hard switching converter [53] are all well suited as intermediary power conversion systems. Therefore, these types of power converters could be easily adapted for the purposes of forming an interlink for every type of power supply for plasma processing.…”

Section: Figure 13mentioning

confidence: 99%

High Performance Power Supplies for Plasma Materials Processing

2021

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Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21 st century. All of these different everyday objects have one thing in common -they are manufactured using plasma processing techniques. The aim of this paper is to introduce this silent hero of modern industry, to a broader audience. An evaluation is made of common types of power converters within the scope of plasma processing applications, while the key requirements and future challenges for such power supplies are discussed.INDEX TERMS Plasma applications, plasma materials processing, power conversion, power electronics.

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