High Performance Power Supplies for Plasma Materials Processing

Baba, Shigeo; Gajewski, Wojciech; Jasiński, Marek

doi:10.1109/access.2021.3054051

Cited by 11 publications

(6 citation statements)

References 78 publications

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“…The voltage (green) was rising in a ramp, and the breakdown happened when it reached 5.3 kV. Theoretically, the current was limited to 3.1 A by R X according to (13), close to the measured 2.9 A (7% error). On the other hand, the solution of ( 7) provides a theoretical maximum inductor current of 0.54 A, while the experimental measurement is 0.55 A (negligible error).…”

Section: Autonomy Of the Equipmentsupporting

confidence: 66%

“…A very common approach in other plasma applications is the use of several stages in a cascade [12,13]. However, for this low power, portable application of the final structure should be as simple as possible.…”

mentioning

confidence: 99%

“…Bearing this in mind, resonant converters have the capability to adapt to very different output conditions, and they are widespread in the industry for many applications [14][15][16][17][18]. In fact, a comprehensive review of power supplies for plasma material processing [13] shows that solutions based on LLC or LCC resonant structures have already been proposed as intermediary power conversion systems [19][20][21]. In this paper, however, the LC-parallel resonant topology is preferred.…”

mentioning

confidence: 99%

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High-Voltage LC-Parallel Resonant Converter with Current Control to Detect Metal Pollutants in Water through Glow-Discharge Plasma

et al. 2022

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This paper presents a high-voltage power source to produce glow-discharge plasma in the frame of a specific application. The load has two well-differentiated types of behavior. To start the system, it is necessary to apply a high voltage, up to 15 kV, to produce air-dielectric breakdown. Before that, the output current is zero. Contrarily, under steady state, the output voltage is smaller (a few hundred volts) while the load requires current-source behavior to maintain a constant glow in the plasma. The amount of current must be selectable by the operator in the range 50 mA–180 mA. Therefore, very different voltage gains are required, and they cannot be easily attained by a single power stage. This work describes why the LC-parallel resonant topology is a good single stage alternative to solve the problem, and shows how to make the design. The step-up transformer is the key component of the converter. It provides galvanic isolation and adapts the voltage gain to the most favorable region of the LC topology, but it also introduces non-avoidable reactive components for the resonant net, determining their shape and, to some extent, their magnitude. In the paper, the transformer’s constructive details receive special attention, with discussion of its model. The experimental dynamic tests, carried out to design the control, show load behavior that resembles negative resistance. This fact makes any control loop prone to instability. To compensate this effect, a resistive ballast is proposed, eliminating its impact on efficiency with a novel filter design, based on an inductor, connected in series with the load beyond the voltage-clamping capacitor. The analysis includes a mathematical model of the filtering capacitor discharge through the inductor during the breakdown transient. The model provides insight into the dimensions of the inductor, to limit the discharge current peak and to analyze the overall performance on steady state. Another detail addressed is the balance among total weight, efficiency and autonomy, which appears if the filter inductor is substituted for a larger battery in autonomous operation. Finally, a comprehensive set of experimental results on the real load illustrate the performance of the power source, showing waveforms at breakdown and at steady state (for different output currents). Additionally, the detector’s constructive principles are described and its experimental performance is explored, showing results with two different types of metallic pollutants in water.

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Section: Autonomy Of the Equipmentsupporting

confidence: 66%

mentioning

confidence: 99%

mentioning

confidence: 99%

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High-Voltage LC-Parallel Resonant Converter with Current Control to Detect Metal Pollutants in Water through Glow-Discharge Plasma

et al. 2022

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“…The favorable performance, high density, and uniformity of plasma have been the goals of researchers. A number of new techniques have been developed to produce such plasma [4], [5], [6], [7], [8]. The plasma parameters and gas breakdown mechanism are influenced by many factors containing the electrode structures, gas pressures, and plasma power sources [9], [10], [11], [12].…”

Section: Introductionmentioning

confidence: 99%

Gas Discharge Properties of Inverse-Brush-Electrodes Driven by Alternating Current

Yao

Yuan

et al. 2023

IEEE Trans. Plasma Sci.

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The inverse-brush-electrodes (IBE) structure with a large area is designed to investigate the discharge mechanism driven by alternating current (ac). It is found that the IBE structure increases the number of secondary electrons and reduces the breakdown voltage by comparing the discharge processes of IBE and plate electrodes. Meanwhile, the breakdown mechanism of gas discharge driven by ac is analyzed in detail. Additionally, the designed IBE structure has a negative differential conductivity enhancement effect than that of plate electrodes when plasmas are generated in the heavy noble gas. Finally, the negative differential conductivity enhancement phenomenon of the IBE structure is analyzed by experiments and simulations. This effect originates from the non-equilibrium electron energy distribution function (EEDF), which is due to the more suprathermal electrons generated by the IBE structure.

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“…Either of these trends is challenging, but the real challenge is facing both of them at once, as traditional approaches for increasing reliability of power electronic converters are not suitable for projects with short lifespan or Time-To-Market (TTM). A very good example of such projects are HPPSs for plasma processing, briefly introduced in [2]. Last, but not least -hardware improvement is not the only way to increase the overall reliability of modern power converter.…”

Section: Introductionmentioning

confidence: 99%

WBG-Based PEBB Module for High Reliability Power Converters

2021

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The increasing presence of power electronic converters in the modern world -from electric vehicles, up to industrial applications -brings up concerns about their reliability, especially in the case of the Wide Band-Gap (WBG) devices. Moreover, ensuring high reliability becomes more challenging due to constantly increasing pressure on the development of new types of power supplies in a shorter time. Thus, research over reliability improvement of modern power converters was initiated. In this paper, a concept of Design For Reliability (DfR) procedure, suitable for projects with a short lifespan, and a case study of Power Electronic Building Block (PEBB) designed according to the proposed procedure are presented. Furthermore, a Reliability Oriented Control (ROC) algorithm for WBG-based converters is discussed.

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High Performance Power Supplies for Plasma Materials Processing

Cited by 11 publications

References 78 publications

High-Voltage LC-Parallel Resonant Converter with Current Control to Detect Metal Pollutants in Water through Glow-Discharge Plasma

High-Voltage LC-Parallel Resonant Converter with Current Control to Detect Metal Pollutants in Water through Glow-Discharge Plasma

Gas Discharge Properties of Inverse-Brush-Electrodes Driven by Alternating Current

WBG-Based PEBB Module for High Reliability Power Converters

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