High-throughput Processes for Industrially Scalable Deposition of Zinc Oxide at Atmospheric Pressure

Aerosol assisted chemical vapour deposition of conformal ZnO compact layers for efficient electron transport in perovskite solar cells

“…However, growth of ultra-thin ZnO by conventional APCVD remains a challenge due to high film growth rates (in the order of 10 nm s -1 ) making the process hard to control. [7] To address this problem, here we propose an aerosol-assisted CVD technique to synthesis conformal ZnO coatings with thickness down to 20 nm onto textured FTO electrodes and serve as the ETL in planar PSCs. The resulting CH3NH3PbI3 PSCs fabricated under ambient conditions achieves a maximum power conversion efficiency of 11.75%.…”