Since it is obvious that Moore's Law in its classical way of scaling, which proved to be powerful over the last decades, is coming to an end, alternative routes towards technological progress are investigated [1]. One of the main fundamental reasons for this is that the smallest features size in newest technology nodes is approaching the level of only a few atom layers. As a result, the development and implementation of technology nodes based on a scaled-down version of the previous one, gets increasingly more expensive. An alternative approach to ensure technological progress of the microelectronics world and the semiconductor industry is described by a trend called "More than Moore" (MtM) [2], based on diversification and integration. In terms of diversification, materials beyond silicon can be considered for the development of sensors and electronics, while the integration aspects come to expression by combining different parts of a system in a smart and optimal way. Wide bandgap (WBG) materials, such as gallium nitride (GaN) or silicon carbide (SiC) are mature for power applications, but for other applications such as lowvoltage (Bi)CMOS and/or VLSI they are still in the research phase. By integrating electronics monolithically on a sensor chip, improved system performance can be obtained by having signal amplifications close to the physical transducer. The integration aspects are strongly related to the packaging of microelectronic and