High-temperature properties of nanocomposite TiBxNy and TiBxCy coatings

Mayrhofer, P.H.; Mitterer, Christian

doi:10.1016/s0257-8972(00)00887-2

Cited by 120 publications

(43 citation statements)

References 34 publications

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“…This signifies that the defects caused by high ion energy bombardment in the presence of N vacancies, are more stable than at low energy bombardment, [57][58] opposite to Rogström et al 8 observations for the stoichiometric case Koller et al 59 have presented the idea that microstructure affects the phase separation of the thin film coatings. It was suggested that under-dense column boundaries caused by lowly biased coatings accelerates decomposition because they provide higher diffusion and reduce retarding forces against volume changes.…”

Section: B Thermal Stability Of Ti1-xalxnymentioning

confidence: 97%

Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54Al0.46Ny) thin films by tuning the applied negative bias voltage

Calamba

Schramm

Johansson-Jöesaar

et al. 2017

Journal of Applied Physics

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Aspects on the phase stability and mechanical properties of nitrogen deficient (Ti0.54Al0.46)N-y alloys were investigated. Solid solution alloys of (Ti,Al)N were grown by cathodic arc deposition. The kinetic energy of the impinging ions was altered by varying the substrate bias voltage from -30V to -80 V. Films deposited with a high bias value of -80V showed larger lattice parameter, finer columnar structure, and higher compressive residual stress resulting in higher hardness than films biased at -30V when comparing their as-deposited states. At elevated temperatures, the presence of nitrogen vacancies and point defects (anti-sites and self-interstitials generated by the ion-bombardment during coating deposition) in (Ti0.54Al0.46)N-0.87 influence the driving force for phase separation. Highly biased nitrogen deficient films have point defects with higher stability during annealing, which cause a delay of the release of the stored lattice strain energy and then accelerates the decomposition tendencies to thermodynamically stable c-TiN and w-AlN. Low biased nitrogen deficient films have retarded phase transformation to w-AlN, which results in the prolongment of age hardening effect up to 1100 degrees C, i.e., the highest reported temperature for Ti-Al-N material system. Our study points out the role of vacancies and point defects in engineering thin films with enhanced thermal stability and mechanical properties for high temperature hard coating applications. Published by AIP Publishing.

Funding Agencies|European Unions Erasmus Mundus doctoral program in Materials Science and Engineering (DocMASE); Swedish Research Council [621-2012-4401]; Swedish government strategic research area grant AFM - SFO MatLiU [2009-00971]; VINNOVA [2013-02355]; DFG; federal state government of Saarland [INST 256/298-1 FUGG]; European Regional Development Fund [AME-Lab C/4-EFRE-13/2009/Br]

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Section: B Thermal Stability Of Ti1-xalxnymentioning

confidence: 97%

Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54Al0.46Ny) thin films by tuning the applied negative bias voltage

Calamba

Schramm

Johansson-Jöesaar

et al. 2017

Journal of Applied Physics

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“…Examples of such systems are nc-M n N/a-Si 3 N 4 {M = Ti, W, V, (Ti 1-x Al x )N/a-Si 3 N 4 [1,17,18] and other hard transition-metal nitrides}, TiN/TiB 2 [1,6,12,13], nc-TiN/BN [20] and others (see review [1]). In the case of the nc-TiN/a-Si 3 N 4 , nc-(Ti 1-x Al x )N/a-Si 3 N 4 , nc-TiN/a-Si 3 N 4 /a-TiSi 2 , and TiN/TiB 2 it was shown that the hardness, measured after the annealing at room temperature, remains unchanged up to the recrystalization temperature of 900-1100 °C.…”

Section: Generic Design Concept and Thermal Stability Of Superhard Namentioning

confidence: 99%

“…All the superhard nanocomposites are deposited by means of plasma induced processing, such as plasma-induced CVD [1,[9][10][11][17][18] and PVD including magnetron sputtering [6,12,13] and vacuum arc evaporation [14]. Alternatively, combined plasma PVD and CVD are used in which the metals (Ti, Al, ...) are evaporated either by means of vacuum arc [14,15] or by sputtering [16] and the nonmetals are introduced as gaseous reactants (e.g., SiH 4 , BCl 3 , B 3 N 3 H 6 ).…”

Section: Introductionmentioning

confidence: 99%

Superhard nanocomposite coatings. From basic science toward industrialization

Vepřek

Jílek²

2002

Pure and Applied Chemistry

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A variety of superhard coatings with Vickers plastic hardness exceeding 40 GPa have been reported by several research groups during the last five years (for recent reviews see refs [1,2]). However, one has to distinguish between superhard nanocomposites, such as nc-TiN/a-Si 3 N 4 , nc-TiN/a-Si 3 N 4 /a-and nc-TiSi 2 , nc-(Ti 1-x Al x )N/a-Si 3 N 4 , nc-TiN/TiB 2 , ncTiN/BN, etc. where the high hardness originates from the nanostrucutre and, therefore, remains stable upon annealing to high temperatures [1], and coatings, such as CrN/Ni, ZrN/Ni, and others [2] in which the measured high hardness is due to a high compressive stress that is induced in the coatings due to energetic ion bombardment during their deposition (e.g., by magnetron sputtering). We also summarize the recent progress in the industrial applications of the superhard nanocomposite coatings on machining tools.

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“…Titanium alloys can be produced by chemical vapor deposition (CVD) or physical vapor deposition (PVD) such as rf-dc sputtering [1315] and ash evaporation [16].…”

Section: Introductionmentioning

confidence: 99%

Characterization of TiAlV Films Prepared by Vacuum Arc Deposition: Effect of Substrate Temperature

2013

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Three TiAlV lms have been prepared by vacuum arc discharge technique at dierent substrate temperatures (50, 300, and 400• C). The depositions were carried out from aluminum, vanadium and titanium elemental targets. The temperature eects on the crystalline quality and texture have been investigated by means of X-ray diraction. Two phases have been identied and the grain size has been found to increase with temperature. The composition of the lms has been determined by proton induced X-ray emission technique. The Ti ratio was found to increase with temperature. The microhardness, measured by the Vickers indentation method was found to decrease with temperature. X-ray photoelectron spectroscopy was used to study the chemical composition of the passive layer formed on the lms by analyzing high resolution spectra of Al 2p, Ti 2p and V 2p. This layer was mainly composed of TiO2 with a small participation of other oxidation and metallic states of Ti, Al and V.

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High-temperature properties of nanocomposite TiBxNy and TiBxCy coatings

Cited by 120 publications

References 34 publications

Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54Al0.46Ny) thin films by tuning the applied negative bias voltage

Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54Al0.46Ny) thin films by tuning the applied negative bias voltage

Superhard nanocomposite coatings. From basic science toward industrialization

Characterization of TiAlV Films Prepared by Vacuum Arc Deposition: Effect of Substrate Temperature

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