High temperature oxygen sensor based on sputtered cerium oxide

Nucleation and Growth of Nanophasic CeO2 Thin Films by Plasma‐Enhanced CVD

“…[15,16,20] The latter phenomenon is responsible for the so-called oxygen storage capacity (OSC) of CeO 2 , [21] allowing this material to act as a chemical air-to-fuel ratio regulator, [22] as well as an oxygen sensor. [23] Currently, there is increasing interest in the possibility of obtaining CeO 2 defective layers with tunable properties. As a matter of fact, the co-presence of Ce III and Ce IV centers, which is believed to be responsible for an improvement of ceria catalytic performances, might eventually allow the preparation of TWCs without noble metals, thus reducing their environmental impact.…”

Functionalized GaN Based Transistors For Biosensing

“…The GOx activity can be reduced to 80% for pH = 5 to 6. If the pH value of the glucose solution is larger than 8, the activity drops off very quickly [15]. When the glucose sensor was used in a pH controlled environment, the drain current stayed fairly constant.…”

“…The conductivity mechanism of most metal oxides based semiconductors results from electron hopping from intrinsic defects in the oxide film and these defects are related to the oxygen vacancies generated during oxide growth [13][14][15]. Typically, the higher the concentration of oxygen vacancies in the oxide film, the more conductive is the film.…”

“…The electrolyte metal oxide oxygen sensor usually uses a reference gas and operates at high temperature (700˚C) [12]. The semiconductor metal oxides mentioned above do not need the reference gas, but they still need to be operated at a considerably high temperature (>400˚C) in order to reach high sensitivity, which means a high power consumption for heating up the sensors [13][14][15]. For biomedical applications, such as monitoring oxygen in the breath for a lung transplant patient, a portable and low power consumption O 2 sensor system is needed.…”

Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films

“…A full understanding of the influence of the deposition conditions on the texture and microstructure [8] in sputtered cerium oxide thin films could be a first incentive towards the optimization of (un)doped ceria thin films to be applied as electrolyte in conventional fuel cells [9] or battery replacements [10], and in oxygen sensors [11,12]. In this study ceria thin films were deposited by reactive magnetron sputtering [13], a physical vapour deposition (PVD) technique, and their structure was characterized as a function of oxygen flow [14] and film thickness.…”