The effect of Si on the oxidation resistance of high purity Nb containing 19% Cr ferritic stainless steels has been investigated by means of isothermal heating at temperatures up to 1 273 K in air and, the structures of the scale and scale/metal interface were investigated with FE-SEM and FE-TEM. The results are as follows: Si improved the oxidation resistance, as reported in previous studies. The Si addition of about 0.1% improved the limit temperature of the oxidation resistance more than 100 K. The presence of an amorphous SiO 2 layer was found in the interface between the Cr 2 O 3 scale and the metal. This layer might act as an oxidation resistance barrier. In the Si-free steel, a NbO 2 layer formed under the Cr 2 O 3 scale, and the Fe 2 Nb-free region formed beneath the surface. On the other hand, when Si was added, the formation of NbO 2 layer was suppressed. In case of 1%Si, no NbO 2 layer formed and the Fe 2 Nb-free region was eliminated. In addition, Fe particles were present in the Cr 2 O 3 scale in the Si-added steel.