High-temperature measurement system with wireless electronics for harsh environments

Abstract

High temperature measurement systems do not allow the use of traditional measurement techniques. In the presence of high temperatures the proper functioning of electronics is compromised. Furthermore, if the measurement environment is also hermetic, the traditional cabled measurement technique cannot be adopted. In this article a system to measure the temperature up to 330°C for harsh environments is proposed. The system is based on a hybrid MEMS placed inside the measuring chamber constituted solely by passive components (an inductor connected to a planar micromachined variable capacitor) and an external reading unit, located in the safe environment. The hybrid MEMS was designed and characterized, as well as the electronics of the readout unit. The results obtained and reported in the article are quite good with those measured by a reference instrument. The complete measurement system is presented as a viable solution to the measurement of high temperatures in harsh industrial environments

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

“…However, the signal readout and processing unit still need to be in a safe environment. One solution is the telemetry between the sensor and readout unit by inductive coupling, which has been applied to LTCC-based pressure sensors [ 19 , 20 ] and temperature sensors [ 21 , 22 ]. Wireless readout of the acceleration is first introduced to the field of LTCC accelerometers.…”