2012
DOI: 10.1088/1742-6596/352/1/012009
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High Temperature Hall sensors using AlGaN/GaN HEMT Structures

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Cited by 34 publications
(17 citation statements)
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“…This is mainly due to the sudden increase of carrier density, leading to impact ionization phenomena. Similar characteristics have been reported for materials fabricated of III-V materials [7,8]. In order to avoid this problem, the use of wide band gap materials such as GaN and SiC could be implemented for high temperature operation [8,9].…”
Section: A Micro-hall Device Sensitivity: Bias and Temperature Studiessupporting
confidence: 62%
“…This is mainly due to the sudden increase of carrier density, leading to impact ionization phenomena. Similar characteristics have been reported for materials fabricated of III-V materials [7,8]. In order to avoid this problem, the use of wide band gap materials such as GaN and SiC could be implemented for high temperature operation [8,9].…”
Section: A Micro-hall Device Sensitivity: Bias and Temperature Studiessupporting
confidence: 62%
“…Wide bandgap of GaN shows potential for stable operation at high temperatures [1]- [4]. Furthermore, GaN and related materials are expected to have a high tolerance for high-energy particle irradiation because of their chemical stability.…”
Section: R Ecent Industrial Trends Indicate Increasing Demandmentioning
confidence: 99%
“…Prior to the proton irradiation we fabricated AlGaN/GaN four-terminal micro-Hall devices [4] with active regions ranging from 1 m 1 m to 5 m 5 m by conventional photolithography consisting of three main steps: 1) formation of the mesa and active "cross" patterns by reactive ion etching (RIE); 2) thermal and electron beam evaporation of Ti/Al/Ni/Au Ohmic contacts; and 3) rapid thermal annealing in a nitrogen atmosphere at 850 C for 90 s. The mesa depth etched by RIE was 300 nm. AlInSb/InAsSb/AlInSb Hall-bar structures with dimensions of 50 m 50 m were also fabricated by photolithography with AuGe ohmic electrodes.…”
Section: R Ecent Industrial Trends Indicate Increasing Demandmentioning
confidence: 99%
“…However, Hall sensors have a higher linear range compared with magnetoresistive sensors, can be integrated onto a single chip with electronics and unlike MR sensors, which can measure a maximum of 180° around a circle due to its periodic behaviour, Hall sensors can measure a full 360° around a circle. Recent research works show the progress made in developing Hall effect sensors for extreme environments [ 137 , 138 , 139 , 140 ] but Hall effect sensors need further research to build up on these preliminary investigations with the aim of commercialization and to increase its stability under severe mechanical effects.…”
Section: Discussion: Research Opportunities For Other Types Of Magmentioning
confidence: 99%