High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers

TiB2‐Modified Polymer‐Derived Ceramic SiCN Double‐Layer Thin Films Fabricated by Direct Writing for High‐Temperature Application

“…Thin‐film sensors (TFS) are widely used for temperature, stress/strain, and heat flux sensing in key fields, such as the aerospace and aircraft industries, coal gasification systems, and material‐processing systems, due to their high sensitivity, ease of integration, fast response, and easy‐to‐extract signals. [ 1 ] Metals/alloys have excellent electrical conductivity and are widely used in TFS integrated in situ with hot components. [ 2 ] Typically, the TFS must be located as close as possible to hot components in a harsh environment to achieve adequate levels of sensitivity and reliability.…”

“…Different from ordinary TFS, thermal stability at high temperatures is the first design principle of high‐temperature TFS [1a] . High‐temperature oxidation is a major challenge limiting the application of TFS with thicknesses of a few micrometers.…”

“…The use of protective coating is an effective method to protect TFS from rapid deterioration of performance at high temperatures. Monocomponent films such as Al 2 O 3 , [ 13 ] SiO 2 , [ 14 ] and heterocomposite layers such as Al 2 O 3 /SiO 2 , [ 15 ] Al 2 O 3 /ZrO 2 , [1a] and Al 2 O 3 /ZrBN–SiCN/Al 2 O 3 [ 13 ] have been used as protective layers for TFS. However, protective coatings via layer‐by‐layer deposition technique reduce the reliability of the film due to multilayer mismatch and interfacial thermal stress.…”