Semiconductor Interfaces and Microstructures 1992
DOI: 10.1142/9789814261722_0012
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HIGH-TEMPERATURE DISCRETE DEVICES IN 6H-SiC: SUBLIMATION EPITAXIAL GROWTH, DEVICE TECHNOLOGY AND ELECTRICAL PERFORMANCE

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Cited by 9 publications
(10 citation statements)
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“…For lower temperatures, the activation energy is in range from 65 to 102 meV and is close to the literature values for nitrogen donor levels [11,13,14]. For higher temperatures, the energy is range from 67 meV to 398 meV and is close to the literature values for boron acceptor levels [13][14][15][16][17][18]. As described before, boron (0.5%) is one of the SiC sintering modifiers.…”
Section: (A) and (B) For Lnσ Error Propagation Is 7⋅10supporting
confidence: 85%
See 1 more Smart Citation
“…For lower temperatures, the activation energy is in range from 65 to 102 meV and is close to the literature values for nitrogen donor levels [11,13,14]. For higher temperatures, the energy is range from 67 meV to 398 meV and is close to the literature values for boron acceptor levels [13][14][15][16][17][18]. As described before, boron (0.5%) is one of the SiC sintering modifiers.…”
Section: (A) and (B) For Lnσ Error Propagation Is 7⋅10supporting
confidence: 85%
“…A few donor levels were determined by Ikeda [13] and Tajim [14]: 93 meV from Raman spectrum investigations, 100 meV from luminescence spectrum observations [12] and 80-100 meV from Hall constant measurements and infrared absorption [17]. Boron is the most common p type dopant for SiC [11][12][13][14][15][16][17][18][19]. The activation energy of acceptor levels for SiC with boron doping varies from 300 meV to 400 meV [18].…”
Section: Introductionmentioning
confidence: 99%
“…This method allowed for the vapor equilibrium to be constant over the substrate. The "sublimation sandwich method" made it possible to grow high quality SiC layers in the temperature range 1600 -2100°C (Vodakov, et al 1979;Tairov, et al 1976;Anikin, et al 1992). An excellent review on SiC sublimation epitaxy was written by Konstantinov (1996).…”
Section: Sublimation Epitaxymentioning
confidence: 99%
“…The majority carrier defects observed here are dopant defect related complexes related to AI doping and B impurities. (8,9) The two lower energy levels are boron related and are referred to as the D center. These complexes were also observed in the as-grown material due to the formation of dopant complexes with intrinsic defects.…”
Section: F 060mentioning
confidence: 99%