2003
DOI: 10.1063/1.1539901
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High-temperature bulge-test setup for mechanical testing of free-standing thin films

Abstract: We developed a bulge-test setup which enables measurement of the elastic and plastic properties of free-standing thin film samples between room temperature and at least 300 °C. Mechanical stress is applied to the film by a differential gas pressure across the sample and the bulge height is measured by a scanning laser beam technique. To prevent sample oxidation the pressure cell containing the sample is mounted in a vacuum chamber. The correct operation of the setup is demonstrated by measurement of the therma… Show more

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Cited by 42 publications
(23 citation statements)
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“…For a circular geometry, this conversion can be done using relationships [75,76] 2 , where r is radius of the opening (75 lm), d is the vertical deflection, and h is the film thickness (one example is shown in Fig. 13).…”
Section: Micromechanical Behavior Of Lbl Membranes With Encapsulated mentioning
confidence: 99%
“…For a circular geometry, this conversion can be done using relationships [75,76] 2 , where r is radius of the opening (75 lm), d is the vertical deflection, and h is the film thickness (one example is shown in Fig. 13).…”
Section: Micromechanical Behavior Of Lbl Membranes With Encapsulated mentioning
confidence: 99%
“…The deflection of the membrane's center (z) is recorded, and material properties are extracted from the pressure-deflection curve, p ¼ f(z). This method has been successfully used to study the properties of silicon, [19] silicon nitride, [20] metallic [21,22] and hard polymer [23,24] thin films, as well as complex multilayer structures. [25] Unlike the hard materials normally characterized by bulge tests, soft (Y % 1 MPa) PDMS membranes exhibit large deformations when submitted to a pressure.…”
Section: Bulge Test Equationsmentioning
confidence: 99%
“…Among them are nanoindentation creep tests, 19 tensile or creep testing of freestanding films, [20][21][22] membrane resonance measurements, 23 and bulge tests. 24,25 Due to difficulties in data analysis, sample preparation, and experimental realization, the number of tested samples is small.…”
Section: Introductionmentioning
confidence: 99%