High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

Kusano, Yoshihiro; Ishii, I.; Kamiya, Tatsuya; Teshigahara, Akihiko; Luo, G.H.; Horsley, David A.

doi:10.1109/tuffc.2019.2921983

Cited by 42 publications

(16 citation statements)

References 26 publications

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“…Micromachining techniques have been introduced to develop MEMS-based array transducers achieving good control of the acoustic radiation patterns [14,15], with relatively high intensity such as Capacitive Micromachined Ultrasonic Transducers (CMUTs) [15]. Active films exhibiting low acoustic impedance, such as polyvinylidene fluoride (PVDF) piezoelectric film, scandium-doped aluminium nitride (ScAlN) film and electromechanical film (EMFi), have also been adopted for ultrasonic transducers in order to achieve better acoustic coupling between the transducer and air [16,17]. More recently, wideband electromagnetic dynamic acoustic transducers and piezoelectric composite transducers have been developed which can couple directly to the air without the need for matching layers [18,19].…”

Section: Introductionmentioning

confidence: 99%

The High Frequency Flexural Ultrasonic Transducer for Transmitting and Receiving Ultrasound in Air

2020

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Section: Introductionmentioning

confidence: 99%

The High Frequency Flexural Ultrasonic Transducer for Transmitting and Receiving Ultrasound in Air

2020

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“…Bulk piezo transducers are preferred for air-coupled applications because of their high output sonic pressure [17]. However, TX power consumption is a significant concern, especially in battery-constrained metamorphic robotic machine vision.…”

Section: B Energy-efficient Tx Requirementmentioning

confidence: 99%

An Ultrasound ASIC With Universal Energy Recycling for >7-m All-Weather Metamorphic Robotic Vision

Zhang

Shao

et al. 2022

IEEE J. Solid-State Circuits

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An ultrasound ASIC that enables compact, 3-D nonvisual robotic navigation for >7-m is presented. The proposed ultrasound ASIC mitigates the limitations of camera vision navigation systems in all-weather, low-power, low-cost aspects. The ASIC integrates TX and RX paths for 64 channels, enabling four-directional navigation using 4 × 4 ultrasound arrays. The proposed universal energy recycling transmitter (UERTX) driver circuit, which can drive both single-ended and differential transducers, reduces energy consumption by 44% compared with non-overlap switching-assisted conventional class-D ultrasonic drivers, addressing large TX power consumption. In addition, the on-chip programmable power management unit (PMU) eliminates off-chip supplies and reduces off-chip passive components for compact system miniaturization. Furthermore, PMU enables the tuning of TX driving amplitude for the range of 6-14 V pp allowing wide detection range adaptability. Fabricated in 0.18 µm 1P6M standard CMOS, the ASIC system measures 25 mm 2 and has >7-m obstacle detection capability while consuming 4.3 mW/channel. The proposed ultrasound ASIC system is demonstrated with a four fps, 3-D navigating metamorphic robot, which consumes 0.28 W, occupies 125 cm 3 , and weighs ≤100 g.

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“…However, as mentioned previously, there has not been a definitive model proposed for the PMUT, which has resulted in its low adoption rate. Research into PMUT design, fabrication, modelling and applications [157], [158] is important and can generate innovations in biomedical IC design.…”

Section: Recommendations For Future Workmentioning

confidence: 99%

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

Zhang

Demosthenous²

2021

IEEE Trans. Biomed. Circuits Syst.

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Medical ultrasound has become a crucial part of modern society and continues to play a vital role in the diagnosis and treatment of illnesses. Over the past decades, the development of medical ultrasound has seen extraordinary progress as a result of the tremendous research advances in microelectronics, transducer technology and signal processing algorithms. However, medical ultrasound still faces many challenges including powerefficient driving of transducers, low-noise recording of ultrasound echoes, effective beamforming in a non-linear, high-attenuation medium (human tissues) and reduced overall form factor. This paper provides a comprehensive review of the design of integrated circuits for medical ultrasound applications. The most important and ubiquitous modules in a medical ultrasound system are addressed, i) transducer driving circuit, ii) low-noise amplifier, iii) beamforming circuit and iv) analog-digital converter. Within each ultrasound module, some representative research highlights are described followed by a comparison of the state-of-the-art. This paper concludes with a discussion and recommendations for future research directions.

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High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

Cited by 42 publications

References 26 publications

The High Frequency Flexural Ultrasonic Transducer for Transmitting and Receiving Ultrasound in Air

The High Frequency Flexural Ultrasonic Transducer for Transmitting and Receiving Ultrasound in Air

An Ultrasound ASIC With Universal Energy Recycling for >7-m All-Weather Metamorphic Robotic Vision

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

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