2014
DOI: 10.1364/oe.22.020038
|View full text |Cite
|
Sign up to set email alerts
|

High speed optical phased array using high contrast grating all-pass filters

Abstract: We report a high speed 8x8 optical phased array using tunable 1550 nm all-pass filters with ultrathin high contrast gratings (HCGs) as the microelectromechanical-actuated top reflectors. The all-pass filter design enables a highly efficient phase tuning (1.7 π) with a small actuation voltage (10 V) and actuation displacement of the HCG (50 nm). The microelectromechanical HCG structure facilitates a high phase tuning speed >0.5 MHz. Beam steering is experimentally demonstrated with the optical phased array.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
33
0

Year Published

2014
2014
2024
2024

Publication Types

Select...
4
3
2

Relationship

0
9

Authors

Journals

citations
Cited by 53 publications
(33 citation statements)
references
References 24 publications
0
33
0
Order By: Relevance
“…SWG reflectors integrated in Fabry-Perot resonators have also been used to realize vertical-cavity surface-emitting lasers (VCSELs) 19 by replacing the conventional DBRs, and also to show novel MEMS devices. 9,20 This asymmetric Fabry-Perot resonator is equivalent to a conventional Gires-Tournois interferometer, with a bottom mirror exhibiting nearly unity reflectivity and a less reflective top mirror, that is widely used for pulse compression bacause of its highly dispersive phase response. Owing to the high electric field energy density in the silicon SWG layer when used in a Fabry-Perot resonator 21 ( Figure 1d), the resonance frequency can be efficiently tuned with respect to the wavelength of the incident light by modulating the refractive index of the silicon bars.…”
mentioning
confidence: 99%
“…SWG reflectors integrated in Fabry-Perot resonators have also been used to realize vertical-cavity surface-emitting lasers (VCSELs) 19 by replacing the conventional DBRs, and also to show novel MEMS devices. 9,20 This asymmetric Fabry-Perot resonator is equivalent to a conventional Gires-Tournois interferometer, with a bottom mirror exhibiting nearly unity reflectivity and a less reflective top mirror, that is widely used for pulse compression bacause of its highly dispersive phase response. Owing to the high electric field energy density in the silicon SWG layer when used in a Fabry-Perot resonator 21 ( Figure 1d), the resonance frequency can be efficiently tuned with respect to the wavelength of the incident light by modulating the refractive index of the silicon bars.…”
mentioning
confidence: 99%
“…With this technique, each unit cell of the device is composed of a single asymmetric Fabry-Perot resonator. This approach has been well-explored previously, in which such structures have been patterned to form beam-steering arrays and phase-only modulation of spatial light distributions10525354. While this methodology may enable implementation of arbitrary phase profiles up to the limit of the Nyquist-Shannon sampling theorem, it would not provide subwavelength resolution due to the required lateral spatial extent of the cavity.…”
Section: Resultsmentioning
confidence: 99%
“…Asymmetric Fabry-Perot-inspired modulators and phased-arrays have been explored previously105253, but have consisted of an array of grating elements per pixel or stacked high contrast gratings54. Both of these approaches fail to provide subwavelength spatial resolution, which is necessary for micron-scale focal lengths and high phase curvatures.…”
mentioning
confidence: 99%
“…In this solution, HCG is utilized as ultra-lightweight mirror. With MEMS technology, small HCG displacement (~50 nm) leads to large phase change (~1.7 π) 11 . Therefore, effective beam steering is achieved.…”
Section: Hcg-apf Opamentioning
confidence: 99%