2019
DOI: 10.1109/jlt.2019.2937906
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High-Speed High-Efficiency Photon-Trapping Broadband Silicon PIN Photodiodes for Short-Reach Optical Interconnects in Data Centers

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Cited by 24 publications
(17 citation statements)
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“…[ 24–27 ] By introducing such PT structures on the surface, the reflection of light is reduced, and the optical path length is increased, enhancing the photon absorption and allowing the use of thinner semiconductor layers for faster carrier collection. [ 1,28 ] Using this approach, ultrafast and highly sensitive PDs have been demonstrated by several groups both for short [ 24,25,29–31 ] and longer wavelengths. [ 26,32–35 ] However, due to the different degrees of freedom for design and fabrication, the implementation of PT structures in PDs remains a challenge.…”
Section: Introductionmentioning
confidence: 99%
“…[ 24–27 ] By introducing such PT structures on the surface, the reflection of light is reduced, and the optical path length is increased, enhancing the photon absorption and allowing the use of thinner semiconductor layers for faster carrier collection. [ 1,28 ] Using this approach, ultrafast and highly sensitive PDs have been demonstrated by several groups both for short [ 24,25,29–31 ] and longer wavelengths. [ 26,32–35 ] However, due to the different degrees of freedom for design and fabrication, the implementation of PT structures in PDs remains a challenge.…”
Section: Introductionmentioning
confidence: 99%
“…The capacitance of P/N-junctions increases proportional to the photodiode area and it is inversely proportional to the width of the space-charge region W [6]. A thin silicon-on-insulator (SOI) layer and non-standard processing for hole patterning to increase the responsivity were used for a 12.5 Gb/s 30-µm photodiode with a capacitance of 60 fF at 15 V, where W was 1.4 µm [7]. A thick low-doped absorption region, however, leads to a large W and can provide a low capacitance of a PIN photodiode.…”
Section: Introductionmentioning
confidence: 99%
“…To increase the absorption and hence the responsivity of low-absorbance devices, miscellaneous structures have been incorporated into photodetertors [ 5 ]. Plasmonic metasurfaces [ 6 , 7 , 8 , 9 ] and photon-trapping structures [ 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ] have been demonstrated to be effective in reinforcement of photoresponses. The disadvantages of metallic metasurfaces that allow conversion of the incident electromagnetic radiation into the surface plasmons are high ohmic losses in the metal [ 18 ] and a small penetration depth of the plasmon field to the semiconductor, particularly for short wavelengths.…”
Section: Introductionmentioning
confidence: 99%